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Fabrication of giant magneto resistance sensing devices with vertically grown Co∕Cu nanowires on a substrate

[+] Author Affiliations
Thong C. Le

University of Arkansas, Department of Electrical Engineering, Control Systems Laboratory, 3183 Bell Engineering Center, Fayetteville, Arkansas 72701

Hargsoon Yoon

University of Arkansas, Wireless Nanosensors and Systems Center, 700 Research Center Boulevard, Fayetteville, Arkansas 72701

Linfeng Chen

University of Arkansas, Wireless Nanosensors and Systems Center, 700 Research Center Boulevard, Fayetteville, Arkansas 72701

Roy C. McCann

University of Arkansas, Department of Electrical Engineering, Control Systems Laboratory, 3183 Bell Engineering Center, Fayetteville, Arkansas 72701

Vijay K. Varadan

University of Arkansas, Wireless Nanosensors and Systems Center, 700 Research Center Boulevard, Fayetteville, Arkansas 72701

J. Micro/Nanolith. MEMS MOEMS. 8(4), 043055 (December 21, 2009). doi:10.1117/1.3273963
History: Received May 03, 2009; Revised August 19, 2009; Accepted October 20, 2009; Published December 21, 2009; Online December 21, 2009
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We describe the fabrication and analysis of a giant magneto resistance (GMR) sensing device with multilayered magnetic nanowires containing alternating ferromagnetic and nonmagnetic layers on a silicon substrate. Multilayered nanowires with Co and Cu layers were vertically grown using pulsed electrochemical deposition to control the periodic structure of nanolayers in a nanopore template. Lithography-assisted template bonding (LATB) was applied to attach a polymer nanopore membrane and grow nanowires on silicon and polyimide substrates. For magnetic field sensing, the multilayered nanowires were electrically connected to top and bottom electrodes by overgrowing nanowires, and low contact resistance values of GMR sensing devices were achieved. The GMR effect was measured with magnetic field changes perpendicular and parallel to the axis of the nanowires. This simple fabrication process is highly favorable for the development of nanoscale electronics with magnetic nanowires at low cost and would offer large design flexibility.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Thong C. Le ; Hargsoon Yoon ; Linfeng Chen ; Roy C. McCann and Vijay K. Varadan
"Fabrication of giant magneto resistance sensing devices with vertically grown Co∕Cu nanowires on a substrate", J. Micro/Nanolith. MEMS MOEMS. 8(4), 043055 (December 21, 2009). ; http://dx.doi.org/10.1117/1.3273963


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