Articles

Fabrication of silicon microring resonator with smooth sidewalls

[+] Author Affiliations
Yao Chen

Guangxi University, College of Physical Science and Technology, Nanning, Guangxi, 530005, China and Huazhong University of Science and Technology, Department of Electronic Science & Technology, Wuhan, Hubei, 430074, China

Junbo Feng

Peking University, State Key Laboratory on Advanced Optical Communication Systems and Networks, Beijing, 100871, China

Zhiping Zhou

Peking University, State Key Laboratory on Advanced Optical Communication Systems and Networks, Beijing, 100871, China and Georgia Institute of Technology, School of Electrical and Computer Engineering, Atlanta, Georgia 30332-0250

Jun Yu

Huazhong University of Science and Technology, Department of Electronic Science & Technology, Wuhan, Hubei, 430074, China

Christopher J. Summers

Georgia Institute of Technology, School of Materials Science and Engineering, Atlanta, Georgia 30332-0250

David S. Citrin

Georgia Institute of Technology, School of Electrical and Computer Engineering, Atlanta, Georgia 30332-0250 and 2958 Georgia Tech-CNRS, Unité Mixte Internationale, Georgia Tech Lorraine, 2 rue Marconi, 57070 Metz, France

J. Micro/Nanolith. MEMS MOEMS. 8(4), 043060 (November 13, 2009). doi:10.1117/1.3258487
History: Received October 08, 2008; Revised September 09, 2009; Accepted September 18, 2009; Published November 13, 2009; Online November 13, 2009
Text Size: A A A

Fabrication of silicon microring resonators was optimized by using electron-beam lithography (EBL) and inductively coupled plasma (ICP) etching with different mask materials. Sidewall roughness of less than 10nm was revealed by high-resolution scanning electron microscopy (SEM) without any post-etch process. The fabrication processes are described in detail, and comparisons are made in consideration of process complexity, process latitude, and sidewall roughness.

Figures in this Article
© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Yao Chen ; Junbo Feng ; Zhiping Zhou ; Jun Yu ; Christopher J. Summers, et al.
"Fabrication of silicon microring resonator with smooth sidewalls", J. Micro/Nanolith. MEMS MOEMS. 8(4), 043060 (November 13, 2009). ; http://dx.doi.org/10.1117/1.3258487


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement


 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.