Articles

Development of polymer electrostatic comb-drive actuator using hot embossing and ultraprecision cutting technology

[+] Author Affiliations
Satoshi Amaya

Towa Corporation, 5 Kamichoshi-cho, Kamitoba, Minami-ku, Kyoto 601–8105, Japan

Dzung Viet Dao

Ritsumeikan University, Research Organization for Science and Engineering, 1–1–1 Noji-higashi, Kusatsu, Shiga 525–8577, Japan

Susumu Sugiyama

Ritsumeikan University, Ritsumeikan Global Innovation Research Organization, 1–1–1 Noji-higashi, Kusatsu, Shiga 525–8577, Japan

J. Micro/Nanolith. MEMS MOEMS. 8(4), 043065 (December 04, 2009). doi:10.1117/1.3268366
History: Received September 03, 2008; Revised July 01, 2009; Accepted October 13, 2009; Published December 04, 2009; Online December 04, 2009
Text Size: A A A

We report the fabrication and evaluation of a PMMA electrostatic comb-drive microactuator using hot embossing and ultra-precision cutting technology. First, a two-step silicon mold is fabricated by bulk micromachining technology. Next, comb-drive microactuator structures are formed on a PMMA plate by hot embossing. Both finger width and gap between fingers are 5μm, and finger thickness is larger than 70μm. Then, the PMMA layer that remained after hot embossing is removed by ultra-precision cutting to release the movable parts. Last, the device is coated with a gold layer for the electrode. The PMMA comb-drive microactuator has been tested successfully.

Figures in this Article
© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Satoshi Amaya ; Dzung Viet Dao and Susumu Sugiyama
"Development of polymer electrostatic comb-drive actuator using hot embossing and ultraprecision cutting technology", J. Micro/Nanolith. MEMS MOEMS. 8(4), 043065 (December 04, 2009). ; http://dx.doi.org/10.1117/1.3268366


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement


 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.