Ion implantation as insoluble treatment for resist-stacking process

Hiroko Nakamura; Takeshi Shibata; Katsumi Rikimaru; Sanae Ito; Satoshi Tanaka; Soichi Inoue

doi:10.1117/1.3302123

1 January 2010 Ion implantation as insoluble treatment for resist-stacking process

Hiroko Nakamura, Takeshi Shibata, Katsumi Rikimaru, Sanae Ito, Satoshi Tanaka, Soichi Inoue

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 9, Issue 1, 013020 (January 2010). https://doi.org/10.1117/1.3302123

Abstract

With regard to the resist-stacking process, it was proposed that the implantation of ions whose acceleration voltage was below 50 kV could make the lower-layer resist insoluble for the upper-layer resist-patterning process. However, the lower-layer resist pattern is observed to be removed after the upper-layer resist patterning in a pattern. In another type of a pattern, there are caves in the bottom of the lower-layer resist pattern after the upper-layer resist patterning. From the calculation of the projected range of the ions, it is found that the ions cannot reach the bottom of the lower-layer resist pattern, and therefore the bottom of the lower-layer resist is not hardened. The removal is due to the dissolution of the bottom in the lower-layer resist during the development of the upper-layer resist pattern. When the acceleration voltage of the implanted ions is set so that the projected range of the ions is larger than the resist thickness, the lower-layer resist can be made effectively insoluble for the upper-layer resist-patterning process. The ion-implanted pattern can be used as the etching mask. Moreover, the ions can be prevented from penetrating the film to be etched by adjusting the thicknesses of stacked antireflective coating.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Hiroko Nakamura, Takeshi Shibata, Katsumi Rikimaru, Sanae Ito, Satoshi Tanaka, and Soichi Inoue "Ion implantation as insoluble treatment for resist-stacking process," Journal of Micro/Nanolithography, MEMS, and MOEMS 9(1), 013020 (1 January 2010). https://doi.org/10.1117/1.3302123

Published: 1 January 2010

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KEYWORDS

Ions

Ion implantation

Photoresist processing

System on a chip

Optical lithography

Double patterning technology

Etching

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