Articles

Characterization of hybrid molding and lithography for SU-8 micro-optical components

[+] Author Affiliations
Aaron T. Cannistra

University of North Carolina at Charlotte, Center for Optoelectronics and Optical Communications, Department of Physics and Optical Science, Charlotte, North Carolina 28223

Thomas J. Suleski

University of North Carolina at Charlotte, Center for Optoelectronics and Optical Communications, Department of Physics and Optical Science, Charlotte, North Carolina 28223

J. Micro/Nanolith. MEMS MOEMS. 9(1), 013025 (February 18, 2010). doi:10.1117/1.3293969
History: Received July 02, 2009; Revised November 05, 2009; Accepted December 03, 2009; Published February 18, 2010; Online February 18, 2010
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SU-8 is a very promising material for micro-optics. It is mechanically robust with high thermal and chemical resistance, has high transmission at visible and near-infrared wavelengths, and has relatively high refractive index after curing. While lithographic processing of SU-8 is relatively common, molding of SU-8 requires different processing parameters due to challenges with solvent removal and cross-linking. Understanding the effects of the molding process on SU-8 is necessary to optimize performance of molded micro-optical components and also to enable fabrication of more complex micro-optics through subsequent lithographic processing of molded structures. We examine properties of SU-8 as it undergoes the molding process. General characterization of SU-8 shrinkage and expansion is presented, and replication of sub-100-nm structures in SU-8 is demonstrated. Solvent content and refractive index as functions of processing parameters are also examined, along with analysis of SU-8’s lithographic properties after undergoing the molding process. These characterizations further enable hybrid combinations of micromolding and lithographic processing to fabricate complex 3-D micro-optics and structures that are difficult or impossible to realize using conventional techniques.

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© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Aaron T. Cannistra and Thomas J. Suleski
"Characterization of hybrid molding and lithography for SU-8 micro-optical components", J. Micro/Nanolith. MEMS MOEMS. 9(1), 013025 (February 18, 2010). ; http://dx.doi.org/10.1117/1.3293969


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