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Fine-pitch high-efficiency spatial optical modulator for mobile display applications

[+] Author Affiliations
Jong Hyeong Song, Sang Kyeong Yun, Hee Yeoun Kim, Seungdo An, Heung Woo Park, Yoon Joon Choi, Victor Yurlov, Anatoliy Lapchuk, Chung Mo Yang, Sung Jun Lee, Jae Wook Jang, Ki Un Lee

Samsung Electro-Mechanics Company, Ltd., SOM R&D and Business Development Group, OS Division, Suwon, Kyunggi-do, Korea 443-743

Ki Suk Woo

Samsung Electro-Mechanics Company, Ltd., Central R&D Institute, CAE Group, Suwon, Kyunggi-do, Korea 443-743

El M. Bourim

Samsung Electro-Mechanics Company, Ltd., SOM R&D and Business Development Group, OS Division, Suwon, Kyunggi-do, Korea 443-743

J. Micro/Nanolith. MEMS MOEMS. 9(1), 013026 (February 23, 2010). doi:10.1117/1.3309711
History: Received April 01, 2009; Revised November 08, 2009; Accepted December 17, 2009; Published February 23, 2010; Online February 23, 2010
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Diffractive spatial optical modulators (SOM) employing a fine-pitch pixel array were introduced. The micromechanical designs of the lead zirconate titanate (PZT) actuator and mirror ribbon structure were optimized for a small volume while maintaining the same level of performance. The same design rule and fabrication equipment were used for a new 10-μm-pitch and conventional 16-μm-pitch SOM. The optical efficiency of the new SOM was 78% (zeroth-order diffraction), which is an improvement over that of the 16-μm-pitch SOM (73%). The full on/off contrast ratio showed no differences, and a high displacement of 500nm was achieved. The stress of the Pt/PZT/Pt actuating layer was the main parameter affecting the initial gap height and displacement of the ribbon. The required ribbon flatness could be achieved by applying a stress gradient on the SiN layer. The temperature-sensitive characteristics, which degrade image quality, could be minimized by a mechanical compensation method that takes advantage of the thermal expansion effect of Si substrates. The estimated lifetime of the device is >4000h. The developed fine-pitch SOM device has sufficient response time and ribbon displacement to be suitable for high-quality embedded laser-projection displays. The VGA optical module was successfully demonstrated in a mobile laser projection display.

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© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Jong Hyeong Song ; Sang Kyeong Yun ; Hee Yeoun Kim ; Seungdo An ; Heung Woo Park, et al.
"Fine-pitch high-efficiency spatial optical modulator for mobile display applications", J. Micro/Nanolith. MEMS MOEMS. 9(1), 013026 (February 23, 2010). ; http://dx.doi.org/10.1117/1.3309711


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