We present a micro-optoelectromechanical systems (MOEMS) phase shifter array that achieves a vertical displacement with peak-to-valley deformation within ( light source). The mirror reflective surface is made of an aluminum layer with a high optical reflectivity exceeding 90%. Each individual micromirror pixel is controlled and driven by comb drive actuators. The phase shifter array is fabricated using the Taiwan Semiconductor Manufacturing Company 2P4M complementary metal-oxide semiconductor process. In-house post-processing is utilized to reserve a -thick bulk-silicon under the mirror. This eliminates mirror deformation from residual stress after the device is released. The micromirror demonstrates a vertical displacement of at . The device resonant frequency is , and the fill factor is 0.65. This MOEMS phase shifter array can be used as a spatial light modulator in holographic data storage systems.