Articles

Novel electrostatic MOEMS phase shifter array using CMOS-MEMS process

[+] Author Affiliations
Jin-Chern Chiou

National Chiao Tung University, Institute of Electrical Control Engineering, Hsinchu, Taiwan 30010 and China Medical University, School of Medicine, Taichung, Taiwan 40402

Chen-Chun Hung

National Chiao Tung University, Institute of Electrical Control Engineering, Hsinchu, Taiwan 30010

Li-Jung Shieh

National Chiao Tung University, Institute of Electrical Control Engineering, Hsinchu, Taiwan 30010

Zhao-Long Tsai

National Chiao Tung University, Institute of Electrical Control Engineering, Hsinchu, Taiwan 30010

J. Micro/Nanolith. MEMS MOEMS. 9(1), 013030 (January 19, 2010). doi:10.1117/1.3280264
History: Received August 03, 2009; Revised November 05, 2009; Accepted November 09, 2009; Published January 19, 2010; Online January 19, 2010
Text Size: A A A

We present a 3×3 micro-optoelectromechanical systems (MOEMS) phase shifter array that achieves a λ4 vertical displacement with peak-to-valley deformation within λ10 (514-nm light source). The mirror reflective surface is made of an aluminum layer with a high optical reflectivity exceeding 90%. Each individual micromirror pixel is controlled and driven by comb drive actuators. The phase shifter array is fabricated using the Taiwan Semiconductor Manufacturing Company 0.35-μm 2P4M complementary metal-oxide semiconductor process. In-house post-processing is utilized to reserve a 40-μm-thick bulk-silicon under the 200μm×200μm mirror. This eliminates mirror deformation from residual stress after the device is released. The micromirror demonstrates a vertical displacement of λ4 at 38V. The device resonant frequency is 3.71kHz, and the fill factor is 0.65. This MOEMS phase shifter array can be used as a spatial light modulator in holographic data storage systems.

Figures in this Article
© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Jin-Chern Chiou ; Chen-Chun Hung ; Li-Jung Shieh and Zhao-Long Tsai
"Novel electrostatic MOEMS phase shifter array using CMOS-MEMS process", J. Micro/Nanolith. MEMS MOEMS. 9(1), 013030 (January 19, 2010). ; http://dx.doi.org/10.1117/1.3280264


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.