Novel electrostatic MOEMS phase shifter array using CMOS-MEMS process

Jin-Chern Chiou; Chen-Chun Hung; Li-Jung Shieh; Zhao-Long Tsai

doi:10.1117/1.3280264

1 January 2010 Novel electrostatic MOEMS phase shifter array using CMOS-MEMS process

Jin-Chern Chiou, Chen-Chun Hung, Li-Jung Shieh, Zhao-Long Tsai

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 9, Issue 1, 013030 (January 2010). https://doi.org/10.1117/1.3280264

Abstract

We present a 3×3 micro-optoelectromechanical systems (MOEMS) phase shifter array that achieves a λ/4 vertical displacement with peak-to-valley deformation within λ/10 (514-nm light source). The mirror reflective surface is made of an aluminum layer with a high optical reflectivity exceeding 90%. Each individual micromirror pixel is controlled and driven by comb drive actuators. The phase shifter array is fabricated using the Taiwan Semiconductor Manufacturing Company 0.35-µm 2P4M complementary metal-oxide semiconductor process. In-house post-processing is utilized to reserve a 40-µm-thick bulk-silicon under the 200 µm×200 µm mirror. This eliminates mirror deformation from residual stress after the device is released. The micromirror demonstrates a vertical displacement of λ/4 at 38 V. The device resonant frequency is 3.71 kHz, and the fill factor is 0.65. This MOEMS phase shifter array can be used as a spatial light modulator in holographic data storage systems.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Jin-Chern Chiou, Chen-Chun Hung, Li-Jung Shieh, and Zhao-Long Tsai "Novel electrostatic MOEMS phase shifter array using CMOS-MEMS process," Journal of Micro/Nanolithography, MEMS, and MOEMS 9(1), 013030 (1 January 2010). https://doi.org/10.1117/1.3280264

Published: 1 January 2010

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