Articles

Fabrication and testing of surface ratchets primed with hydrophobic parylene and hexamethyldisilazane for transporting droplets

[+] Author Affiliations
Yung-Chiang Chung

Ming Chi University of Technology, Department of Mechanical Engineering, 84, Gung-Juan Road, Taishan, Taipei County 243, Taiwan

Guo-Yuan Hess

Tamkang University, Department of Mechanical and Electro-Mechanical Engineering, 151 Ying-chuan Road, Tamsui, Taipei County 25137, Taiwan

Fu-Wen Yeh

Tamkang University, Department of Mechanical and Electro-Mechanical Engineering, 151 Ying-chuan Road, Tamsui, Taipei County 25137, Taiwan

Hsieh-Cheng Han

National Taiwan University, Institute of Microbiology and Biochemistry, 1, Sec. 4, Roosevelt Road, Taipei City 10617, Taiwan

Chien-Yuan Chen

National Taiwan University, Institute of Microbiology and Biochemistry, 1, Sec. 4, Roosevelt Road, Taipei City 10617, Taiwan

Ching-Jiun Lee

National Taiwan University, Institute of Applied Mechanics, 1, Sec. 4, Roosevelt Road, Taipei City 10617, Taiwan

Horn-Jiunn Sheen

National Taiwan University, Institute of Applied Mechanics, 1, Sec. 4, Roosevelt Road, Taipei City 10617, Taiwan

Lung-Jieh Yang

Tamkang University, Department of Mechanical and Electro-Mechanical Engineering, 151 Ying-chuan Road, Tamsui, Taipei County 25137, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 9(1), 013035 (February 03, 2010). doi:10.1117/1.3280261
History: Received May 19, 2009; Revised October 13, 2009; Accepted November 09, 2009; Published February 03, 2010; Online February 03, 2010
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We demonstrate a way to transport droplets by an arrowed micropillar array surface with hydrophobic parylene. The lightly hydrophilic parylene surface could be changed to hydrophobic one by treating with fluorine-based plasma (CF4 or SF6). The droplet on this hydrophobic parylene surface with arrowed ratchets could be transported by a speaker, and the average measured velocity was 29mms. Moreover, the authors compared driving performance of the parylene surface ratchets with the ones modified by the hexamethyldisilazane (HMDS) vapor. Both the results of using hydrophobic parylene and HMDS were better than the previous work.

Figures in this Article
© 2010 Society of Photo-Optical Instrumentation Engineers

Topics

Plasmas ; Fabrication

Citation

Yung-Chiang Chung ; Guo-Yuan Hess ; Fu-Wen Yeh ; Hsieh-Cheng Han ; Chien-Yuan Chen, et al.
"Fabrication and testing of surface ratchets primed with hydrophobic parylene and hexamethyldisilazane for transporting droplets", J. Micro/Nanolith. MEMS MOEMS. 9(1), 013035 (February 03, 2010). ; http://dx.doi.org/10.1117/1.3280261


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