Fabrication and testing of surface ratchets primed with hydrophobic parylene and hexamethyldisilazane for transporting droplets

Yung-Chiang Chung; Guo-Yuan Hess; Fu-Wen Yeh; Hsieh-Cheng Han; Chien-Yuan Chen; Ching-Jiun Lee; Horn-Jiunn Sheen; Lung Jieh Yang

doi:10.1117/1.3280261

1 January 2010 Fabrication and testing of surface ratchets primed with hydrophobic parylene and hexamethyldisilazane for transporting droplets

Yung-Chiang Chung, Guo-Yuan Hess, Fu-Wen Yeh, Hsieh-Cheng Han, Chien-Yuan Chen, Ching-Jiun Lee, Horn-Jiunn Sheen, Lung Jieh Yang

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 9, Issue 1, 013035 (January 2010). https://doi.org/10.1117/1.3280261

Abstract

We demonstrate a way to transport droplets by an arrowed micropillar array surface with hydrophobic parylene. The lightly hydrophilic parylene surface could be changed to hydrophobic one by treating with fluorine-based plasma (CF₄ or SF₆). The droplet on this hydrophobic parylene surface with arrowed ratchets could be transported by a speaker, and the average measured velocity was 29 mm/s. Moreover, the authors compared driving performance of the parylene surface ratchets with the ones modified by the hexamethyldisilazane (HMDS) vapor. Both the results of using hydrophobic parylene and HMDS were better than the previous work.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Yung-Chiang Chung, Guo-Yuan Hess, Fu-Wen Yeh, Hsieh-Cheng Han, Chien-Yuan Chen, Ching-Jiun Lee, Horn-Jiunn Sheen, and Lung Jieh Yang "Fabrication and testing of surface ratchets primed with hydrophobic parylene and hexamethyldisilazane for transporting droplets," Journal of Micro/Nanolithography, MEMS, and MOEMS 9(1), 013035 (1 January 2010). https://doi.org/10.1117/1.3280261

Published: 1 January 2010

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