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Design and low-temperature cofired ceramic fabrication of a novel vibration-induced electromagnetic microgenerator with enhanced power output

[+] Author Affiliations
Yeong-Maw Hwang

National Sun Yat-Sen University, Department of Mechanical and Electro-Mechanical Engineering, Kaohsiung 804, Taiwan

Wen-Long Lu

National Sun Yat-Sen University, Department of Mechanical and Electro-Mechanical Engineering, Kaohsiung 804, Taiwan

Chen-Tang Pan

National Sun Yat-Sen University, Department of Mechanical and Electro-Mechanical Engineering, Kaohsiung 804, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 9(1), 013052 (February 19, 2010). doi:10.1117/1.3316406
History: Received July 14, 2009; Revised November 23, 2009; Accepted December 31, 2009; Published February 19, 2010; Online February 19, 2010
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We present a novel vibration-induced electromagnetic microgenerator with enhanced power output, which uses a unique inducer made of multilayer silver (Ag) coils and a magnet with a neodymium-iron-boron (NdFeB) central core. The device converts mechanical power into electric power using electromagnetic induction that arises from relative motion between the magnet and the vibrating induction coil. The Ag coils are combined with the ceramic microspring to build the inducer. The configuration of magnets is chosen such that the magnetic field in the radial direction for electromotive force is perpendicular to the velocity vector within the vibrating induction coil. Ansoft Maxwell (Pittsburgh, Pennsylvania) modal analysis is used to predict the magnetic field. In this work, the manufacturing technology of multilayer Ag coils of low temperature cofired ceramic (LTCC) is first used and feasible for the fabrication of vibration-induced electromagnetic devices. The experimental results produce a maximum electromotive force of 25.19mV and a power output of 1mW at a frequency of 120Hz and amplitude of 0.03mm. The volumetric and mass power densities per frequency are found to be 1.97×102mWcm3Hz and 314mWKgHz. The new design mechanism has been build and is valid for power output.

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© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Yeong-Maw Hwang ; Wen-Long Lu and Chen-Tang Pan
"Design and low-temperature cofired ceramic fabrication of a novel vibration-induced electromagnetic microgenerator with enhanced power output", J. Micro/Nanolith. MEMS MOEMS. 9(1), 013052 (February 19, 2010). ; http://dx.doi.org/10.1117/1.3316406


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