Articles

Fabrication of uniform large-area polymer “woodpile” photonic crystals structures with nanometer-scale features

[+] Author Affiliations
Neilanjan Dutta

University of Delaware, Department of Electrical Engineering, Newark, Delaware 19716

Peng Yao

University of Delaware, Department of Electrical Engineering, Newark, Delaware 19716

Ahmed S. Sharkawy

EM Photonics, Inc., 51 East Main Street, Newark Delaware 19711

Garrett J. Schneider

University of Delaware, Department of Electrical Engineering, Newark, Delaware 19716

Shouyuan Shi

University of Delaware, Department of Electrical Engineering, Newark, Delaware 19716

Dennis W. Prather

University of Delaware, Department of Electrical Engineering, Newark, Delaware 19716

J. Micro/Nanolith. MEMS MOEMS. 9(2), 023003 (April 02, 2010). doi:10.1117/1.3373515
History: Received December 02, 2009; Revised January 22, 2010; Accepted February 15, 2010; Published April 02, 2010; Online April 02, 2010
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We demonstrate a process to fabricate highly uniform large-area polymer 3-D “woodpile” photonic crystal structures with nanometer-scale features. This fabrication process utilizes the SU-8 resist’s enhanced absorption of deep-UV wavelengths to achieve resist exposure confinement to a desired depth. It also uses the high resistance of cross-linked SU-8 resist to solvents for layer-upon-layer resist application and processing. This fabrication method affords the flexibility of incorporating arbitrary design patterns for the different layers. Depending on the exposure mask area and the size of exposure window available in the mask aligner, this fabrication process can provide such devices over wafer-scale areas. This fabrication method is highly compatible with standard semiconductor processing methods and is thus well suited for mass fabrication.

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© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Neilanjan Dutta ; Peng Yao ; Ahmed S. Sharkawy ; Garrett J. Schneider ; Shouyuan Shi, et al.
"Fabrication of uniform large-area polymer “woodpile” photonic crystals structures with nanometer-scale features", J. Micro/Nanolith. MEMS MOEMS. 9(2), 023003 (April 02, 2010). ; http://dx.doi.org/10.1117/1.3373515


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