Articles

Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP

[+] Author Affiliations
Cho Jui Tay

National University of Singapore, Department of Mechanical Engineering, 9 Engineering Drive 1, Singapore 117576

Chenggen Quan

National University of Singapore, Department of Mechanical Engineering, 9 Engineering Drive 1, Singapore 117576

Huicong Liu

National University of Singapore, Department of Mechanical Engineering, 9 Engineering Drive 1, Singapore 117576

Mahadevaiah Gopal

National University of Singapore, Department of Mechanical Engineering, 9 Engineering Drive 1, Singapore 117576

Ramam Akkipeddi

Institute of Material Research and Engineering, 3 Research Link, Singapore 117602

J. Micro/Nanolith. MEMS MOEMS. 9(2), 023010 (May 20, 2010). doi:10.1117/1.3421968
History: Received September 04, 2009; Revised March 06, 2010; Accepted March 22, 2010; Published May 20, 2010; Online May 20, 2010
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Because of the gradient distribution of arsenic through the thickness of an InP layer, stress gradient in the structural layer of an InP-based Fabry–Perot (FP) cavity structure could be introduced during the fabrication process. This stress gradient, usually tensile at the upper surface and compressive at the lower surface, could induce a significant out-of-plane deformation, which may eventually affect its optical performance. White-light vertical scanning interferometry is employed to measure the stress-induced deflection of InP-based cantilever and membrane components used in a FP cavity structure. Deformation patterns caused by stress gradient in various cantilever and membrane structures with different configurations and geometries are investigated through experiments and simulations. The results indicate that the stress gradient induced during the fabrication process results in varying degrees of the FP structural deformation, which is further influenced by the configurations and geometries of the structural membranes and supporting beams. Four types of membrane structures of a FP cavity device are studied, and the results are compared to that obtained using a finite element analysis.

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© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Cho Jui Tay ; Chenggen Quan ; Huicong Liu ; Mahadevaiah Gopal and Ramam Akkipeddi
"Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP", J. Micro/Nanolith. MEMS MOEMS. 9(2), 023010 (May 20, 2010). ; http://dx.doi.org/10.1117/1.3421968


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