Articles

Dual-dome micromechanical resonator fabricated with reactive ion etching and plasma-enhanced chemical vapor deposition techniques

[+] Author Affiliations
Sami Myllymaki

University of Oulu, Microelectronics and Materials Physics Laboratories, P.O. Box 4500, Oulu FI-90014, Finland

J. Micro/Nanolith. MEMS MOEMS. 9(2), 023012 (June 01, 2010). doi:10.1117/1.3435350
History: Received June 22, 2009; Revised April 06, 2010; Accepted April 14, 2010; Published June 01, 2010; Online June 01, 2010
Text Size: A A A

A novel dual-dome micromechanical resonator and a method for fabricating it into a single or amorphous crystal silicon film layer is demonstrated. An electrostatic effect on the input resonator induces high-frequency resonant mechanical motion in the first dome plate, which is mechanically conducted into the second equivalent dome plate. Transduction from the input resonator to the output resonator is mechanically performed not by using coupling rods but by overlapping the plates. Oscillations are obtained at 8.5MHz and 17MHz when the resonator is buffered with a high-impedance junction gate field-effect transistor amplifier.

Figures in this Article
© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Sami Myllymaki
"Dual-dome micromechanical resonator fabricated with reactive ion etching and plasma-enhanced chemical vapor deposition techniques", J. Micro/Nanolith. MEMS MOEMS. 9(2), 023012 (June 01, 2010). ; http://dx.doi.org/10.1117/1.3435350


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement


 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.