SU-8 rib waveguide Bragg grating filter using composite stamp and solvent-assisted microcontact molding technique

Cheng-Sheng Huang; Yue-Bun Pun; Wei-Chih Wang

doi:10.1117/1.3453671

1 April 2010 SU-8 rib waveguide Bragg grating filter using composite stamp and solvent-assisted microcontact molding technique

Cheng-Sheng Huang, Yue-Bun Pun, Wei-Chih Wang

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 9, Issue 2, 023013 (April 2010). https://doi.org/10.1117/1.3453671

Abstract

We present a simple fabrication technique using a hydrophobic composite elastomer for patterning an SU-8-based rib waveguide Bragg grating filter via solvent-assisted microcontact molding (SAMIM). The proposed technique utilizes a two-layered composite stamp made of polydimethylsiloxane and hard polydimethylsiloxane, which enables both the rib waveguide and surface relief grating structure to be patterned simultaneously. The SAMIM method realizes patterning at ambient temperatures with the weight of the mold applying all the pressure necessary. By allowing the mold to absorb solvent when in contact with the polymer, the solvent dissolves or swells the polymer's surface, creating the desired pattern. This composite mold successfully demonstrates the SAMIM creation of the SU-8 rib waveguide and gratings, paving the way for a facile and efficient reproduction of a polymeric rib waveguide grating filter. Based on experimental results, the stamp demonstrates an operational life span in excess of 10 successful replications, utilizing a Bragg grating test pattern with a grating period of ~492 nm, a depth of ~250 nm, and a total length of 12 mm. The resulting waveguides show a band-rejection gain of −17 dB at the center wavelength of 1545 nm and a 3-dB bandwidth of 2.5 nm.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Cheng-Sheng Huang, Yue-Bun Pun, and Wei-Chih Wang "SU-8 rib waveguide Bragg grating filter using composite stamp and solvent-assisted microcontact molding technique," Journal of Micro/Nanolithography, MEMS, and MOEMS 9(2), 023013 (1 April 2010). https://doi.org/10.1117/1.3453671

Published: 1 April 2010

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available