Special Section on BioMEMS, Theory and Practice of MEMS/NEMS, and Sensors

Uncooled infrared detection with two-color microbolometers using a micro-optoelectromechanical systems tunable micromirror

[+] Author Affiliations
Yu-Guang Gong

University of Electronic Science and Technology of China, School of Optoelectronic Information, Chengdu, 610054, China

Wei Li

University of Electronic Science and Technology of China, State Key Laboratory of Electronic Thin Films and Integrated Devices, Chengdu, 610054, China

Hai-Hong Cai, Zhi Li, Chao Chen

University of Electronic Science and Technology of China, School of Optoelectronic Information, Chengdu, 610054, China

Ya-Dong Jiang

University of Electronic Science and Technology of China, State Key Laboratory of Electronic Thin Films and Integrated Devices, Chengdu, 610054, China

J. Micro/Nanolith. MEMS MOEMS. 9(3), 031005 (July 06, 2010). doi:10.1117/1.3455343
History: Received September 15, 2009; Revised February 10, 2010; Accepted February 22, 2010; Published July 06, 2010; Online July 06, 2010
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A tunable reflecting micro-optoelectromechanical systems (MOEMS) micromirror is designed for measuring the actual temperature and color of an object based on comparison of two wavelength response windows, 3–5 and 812μm. The MOEMS micromirror with switching between two positions by an applied electrostatic voltage provides a response to two wavelength windows by tuning the optical resonant cavity. Three different structural models of the tunable micromirror, which are made up of single Al layer with type I legs, single Al layer with type L legs, and double AlSi3N4 layers with type I legs, are designed and simulated accurately using ANSYS tools on a 35-μm pixel-pitch array. On the basis of the comparsion, the third model, made up of double AlSi3N4 layers with type I legs, is chosen. With different distances between the MOEMS micromirror and the bottom electrode, the total capacitance of the tunable micromirror is gained based on electromagnetic analysis and theoretical equation. The pull-in voltage is calculated as 8.21V by electrostatic-mechanical coupling analysis, and the maximum stress is 368.744MPa, which is less than the yield strength of Si3N4 thin film. But if the voltage is increased to 9.73V, the micromirror will touch the bottom electrode by pull-in behavior.

© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Yu-Guang Gong ; Wei Li ; Hai-Hong Cai ; Zhi Li ; Chao Chen, et al.
"Uncooled infrared detection with two-color microbolometers using a micro-optoelectromechanical systems tunable micromirror", J. Micro/Nanolith. MEMS MOEMS. 9(3), 031005 (July 06, 2010). ; http://dx.doi.org/10.1117/1.3455343


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