Special Section on BioMEMS, Theory and Practice of MEMS/NEMS, and Sensors

Comparison of different metal film thicknesses of cyclic olefin copolymer–substrate polymerase chain-reaction chips with single-side and double-side heaters

[+] Author Affiliations
Yung-Chiang Chung

Ming Chi University of Technology, Department of Mechanical Engineering, Taipei, Taiwan

Li-Wei Lai

Ming Chi University of Technology, Department of Mechanical Engineering, Taipei, Taiwan

Lung-Jieh Yang

Tamkang University, Department of Mechanical and Electro-Mechanical Engineering, Taipei, Taiwan

Wei-Jie Liao

Ming Chi University of Technology, Department of Mechanical Engineering, Taipei, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 9(3), 031006 (July 08, 2010). doi:10.1117/1.3455371
History: Received August 18, 2009; Revised February 01, 2010; Accepted March 03, 2010; Published July 08, 2010; Online July 08, 2010
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The polymerase chain reaction (PCR) chips of different metal film thicknesses were fabricated, and the PCR machine with/without a top heater and the single-side/double-side heater PCR chips were compared. Before fabricating the chips, one simulated the effect of various thin-film thicknesses and the temperature distributions of various powers, and it helped one to find the optimum parameters. The total substrate material was cyclic olefin copolymers, and the gold film was fabricated on the substrate by evaporation. The results after PCR for the deoxyri bonucleic acid (DNA) of an Escherichia coli TG-1 cell were obtained. The results of the DNA amplifying 225bps were 0.840.92ngμl, and these were 78–85% of the result of PCR machine with a top heater. There was no PCR product in the PCR machine without a top heater and single-side PCR chip. The thermal deformation temperature, thermal conductivity, and substrate thickness are the important parameters in a polymer substrate PCR chip, and the thermal deformation temperature is the key parameter.

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© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Yung-Chiang Chung ; Li-Wei Lai ; Lung-Jieh Yang and Wei-Jie Liao
"Comparison of different metal film thicknesses of cyclic olefin copolymer–substrate polymerase chain-reaction chips with single-side and double-side heaters", J. Micro/Nanolith. MEMS MOEMS. 9(3), 031006 (July 08, 2010). ; http://dx.doi.org/10.1117/1.3455371


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