Special Section on BioMEMS, Theory and Practice of MEMS/NEMS, and Sensors

Three-dimensional flexible microprobe for recording the neural signal

[+] Author Affiliations
Chang-Hsiao Chen

National Tsing Hua University, Institute of NanoEngineering and MicroSystems, Hsinchu 30013, Taiwan

Shih-Chang Chuang

National Tsing Hua University, Institute of NanoEngineering and MicroSystems, Hsinchu 30013, Taiwan

Yu-Tao Lee

National Tsing Hua University, Institute of NanoEngineering and MicroSystems, Hsinchu 30013, Taiwan

Yen-Chung Chang

National Tsing Hua University, Institute of NanoEngineering and MicroSystems and Institute of Molecular Medicine and Department of Life Sciences, Hsinchu 30013, Taiwan

Shih-Rung Yeh

National Tsing Hua University, Institute of Molecular Medicine and Department of Life Sciences, Hsinchu 30013, Taiwan

Da-Jeng Yao

National Tsing Hua University, Institute of NanoEngineering and MicroSystems, Hsinchu 30013, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 9(3), 031007 (July 23, 2010). doi:10.1117/1.3455409
History: Received November 30, 2009; Revised May 01, 2010; Accepted May 04, 2010; Published July 23, 2010; Online July 23, 2010
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We have designed, fabricated, and tested a novel three-dimensional (3-D) flexible microprobe used for recording the neural signals of lateral giant (LG) on the escape system of American crayfish. We report an electrostatic actuation process to fold the planar probes to be the arbitrary orientations of 3-D probes for neuroscience application. The batch assembly method based on electrostatic force techniques gave more simple fabrication compared to others. A flexible probe could reduce both the chronic inflammation response and material fracture when animal breathes or moves. Furthermore, the cortex corresponds to hypothetical cortical modules with mostly vertically organized layers of neurons. Therefore, the 3-D flexible probe suits to understand how the cooperative activity for different layers of neurons. Advisedly, we present a novel fabrication for the 3-D flexible probe by using Parylene technology. The mechanical strength of the neural probe is strong enough to penetrate into a biogel. At the end, the flexible probe was used to record neural signals of the LG cell from American crayfish.

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© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Chang-Hsiao Chen ; Shih-Chang Chuang ; Yu-Tao Lee ; Yen-Chung Chang ; Shih-Rung Yeh, et al.
"Three-dimensional flexible microprobe for recording the neural signal", J. Micro/Nanolith. MEMS MOEMS. 9(3), 031007 (July 23, 2010). ; http://dx.doi.org/10.1117/1.3455409


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