Special Section on BioMEMS, Theory and Practice of MEMS/NEMS, and Sensors

Characterization of ZnO films of surface acoustic-wave oscillators for ultraviolet sensing applications

[+] Author Affiliations
Ching-Liang Wei

National Sun Yat-Sen University, Department of Electrical Engineering, No. 70, Lien-Hai Road, Kaohsiung, 804 Taiwan

Ying-Chung Chen

National Sun Yat-Sen University, Department of Electrical Engineering, No. 70, Lien-Hai Road, Kaohsiung, 804 Taiwan

Kuo-Sheng Kao

Shu-Te University, Department of Computer and Communication, No. 59, Hengshan Road, Yanchao, Kaohsiung County, 824 Taiwan

Kuang-Tsung Wu

Shu-Te University, Department of Computer and Communication, No. 59, Hengshan Road, Yanchao, Kaohsiung County, 824 Taiwan

Da-Long Cheng

Shu-Te University, Department of Computer and Communication, No. 59, Hengshan Road, Yanchao, Kaohsiung County, 824 Taiwan

Po-Tung Hsieh

National Cheng Kung University, Center for Micro/Nano Science and Technology, No. 1 University Road, Tainan, 701 Taiwan

J. Micro/Nanolith. MEMS MOEMS. 9(3), 031009 (July 06, 2010). doi:10.1117/1.3459938
History: Received December 30, 2009; Revised April 27, 2010; Accepted May 21, 2010; Published July 06, 2010; Online July 06, 2010
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A UV sensor composed of a surface acoustic wave (SAW) device and a high-frequency amplifier was constructed using a Colpitts oscillator circuit. Zinc oxide (ZnO) films of SAW devices were prepared on lithium niobate substrates with various deposition temperatures to investigate their effect on the sensitivity of UV sensors. Larger grain sizes and a better chemical composition of the ZnO films were obtained at high-deposition temperatures rather than at low-deposition temperatures. An extreme frequency shift of 264kHz and sensitivity of 0.21kHz(μWcm2) were obtained for the ZnO-based SAW oscillator at the deposition temperature of 400°C.

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© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Ching-Liang Wei ; Ying-Chung Chen ; Kuo-Sheng Kao ; Kuang-Tsung Wu ; Da-Long Cheng, et al.
"Characterization of ZnO films of surface acoustic-wave oscillators for ultraviolet sensing applications", J. Micro/Nanolith. MEMS MOEMS. 9(3), 031009 (July 06, 2010). ; http://dx.doi.org/10.1117/1.3459938


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