Special Section on BioMEMS, Theory and Practice of MEMS/NEMS, and Sensors

Optimization of an optical disk manufacturing process for polymer microfluidic substrates by using the design of experiment methodology

[+] Author Affiliations
Chun-Han Wu

National Chiao Tung University, Department of Mechanical Engineering, 1001 University Road, Hsin Chu 300, Taiwan and RITEK Corporation, Research Center, 42 Kuanfu North Road, Hsin Chu Industrial Park 303, Taiwan

Wen-Syang Hsu

National Chiao Tung University, Department of Mechanical Engineering, 1001 University Road, Hsin Chu 300, Taiwan

Kuo-Wei Fan

RITEK Corporation, Research Center, 42 Kuanfu North Road, Hsin Chu Industrial Park 303, Taiwan

Yu-Ling Lin

RITEK Corporation, Research Center, 42 Kuanfu North Road, Hsin Chu Industrial Park 303, Taiwan

Yu-Cheng Lin

National Cheng Kung University, Department of Engineering Science, 1 University Road, Tainan 701, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 9(3), 031011 (September 30, 2010). doi:10.1117/1.3491363
History: Received September 10, 2009; Revised August 19, 2010; Accepted August 19, 2010; Published September 30, 2010; Online September 30, 2010
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We present an improved method for manufacturing microfluidic structures on a polymer-based substrate, and the design of experiment (DOE) is used to extract the optimum injection parameters. The long cycle time of the injection molding causes high costs in manufacturing, and this prevents conventional techniques from being widely used for mass production. Therefore, this study adopts a new optical disk process to reduce the cycle time. The cycle time of the new method can be reduced by more than ten-fold compared with that of traditional ones. Also, this new method can prevent damage on the mirror plate of the mold. The mold system is composed of a mold insert (stamper) holder and a vacuum system to join the mold insert with the mold. In this way, the time needed to change the stamper is drastically decreased. Our proposed method has the ability to reduce the time required to insert the mold from several hours to a few minutes, to prevent damage on the mirror plate of the mold, and to decrease the cycle time of molding from several minutes to 4sec. The DOE is applied to study the effects of molding parameters on replication rate of depth, width deviation, birefringence, tilt and surface roughness of the microfluidic substrates. The experimental results show that the proposed method is suitable for mass production.

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© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Chun-Han Wu ; Wen-Syang Hsu ; Kuo-Wei Fan ; Yu-Ling Lin and Yu-Cheng Lin
"Optimization of an optical disk manufacturing process for polymer microfluidic substrates by using the design of experiment methodology", J. Micro/Nanolith. MEMS MOEMS. 9(3), 031011 (September 30, 2010). ; http://dx.doi.org/10.1117/1.3491363


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