Special Section on Reliability, Packaging, Testing, and Characterization of MEMS and MOEMS II

Characterization of gold/gold, gold/ruthenium, and ruthenium/ruthenium ohmic contacts in MEMS switches improved by a novel methodology

[+] Author Affiliations
Adrien Broué

NovaMEMS, c/o Centre National d’Etudes Spatiales, Centre Spatial de Toulouse, 18 Avenue Edouard Belin, 31401 Toulouse Cedex 4, France and Centre National de la Recherche Scientifique, Laboratoire d’Analyse et d’Architechture des Systèmes, 7 Avenue du Colonel Roche, F-31077 Toulouse, France and Université de Toulouse and Université de Paul Sabatier, Institut National des Sciences Appliquées de Toulouse, Institut National Polytechnique de Toulouse, Institut Supérieur de l’Aéronautique et de l’Espace, Laboratoire d’Analyse et d’Architechture des Systèmes, F-31077 Toulouse, France E-mail: adrien.broue@novamems.com

Jérémie Dhennin

NovaMEMS, c/o Centre National d’Etudes Spatiales, Centre Spatial de Toulouse, 18 Avenue Edouard Belin, 31401 Toulouse Cedex 4, France

Frédéric Courtade

Centre National d’Etudes Spatiales, Centre Spatial de Toulouse, 18 Avenue Edouard Belin, 31401 Toulouse Cedex 4, France

Christel Dieppedal

Commissariat à l'Energie Atomique - Laboratoire, d'Electronique des Technologies de l'Information, Minatec, 17 Rue des Martyrs, 38054 Grenoble Cedex 9, France

Patrick Pons

Centre National de la Recherche Scientifique, Laboratoire d’Analyse et d’Architechture des Systèmes, 7 Avenue du Colonel Roche, F-31077 Toulouse, France and Université de Toulouse and Université de Paul Sabatier, Institut National des Sciences Appliquées de Toulouse, Institut National Polytechnique de Toulouse, Institut Supérieur de l’Aéronautique et de l’Espace, Laboratoire d’Analyse et d’Architechture des Systèmes, F-31077 Toulouse, France

Xavier Lafontan

NovaMEMS, c/o Centre National d’Etudes Spatiales, Centre Spatial de Toulouse, 18 Avenue Edouard Belin, 31401 Toulouse Cedex 4, France and Intesens SAS, 10 Avenue de l’Europe, 31520 Ramonville, France

Robert Plana

Centre National de la Recherche Scientifique, Laboratoire d’Analyse et d’Architechture des Systèmes, 7 Avenue du Colonel Roche, F-31077 Toulouse, France and Université de Toulouse and Université de Paul Sabatier, Institut National des Sciences Appliquées de Toulouse, Institut National Polytechnique de Toulouse, Institut Supérieur de l’Aéronautique et de l’Espace, Laboratoire d’Analyse et d’Architechture des Systèmes, F-31077 Toulouse, France

J. Micro/Nanolith. MEMS MOEMS. 9(4), 041102 (December 06, 2010). doi:10.1117/1.3504663
History: Received February 08, 2010; Accepted March 15, 2010; Published December 06, 2010; Online December 06, 2010
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Comparisons between several pairs of contact materials are done with a new methodology using a commercial nanoindenter coupled with electrical measurements on test vehicles specially designed to investigate microscale contact physics. Experimental measurements are obtained to characterize the response of a 5-μm2-square contact bump under electromechanical stress with increased applied current. The data provide a better understanding of microcontact behavior related to the impact of current at low- to medium-power levels. Contact temperature rise is observed, leading to shifts of the mechanical properties of contact materials and modifications of the contact surface. The stability of the contact resistance, when the contact force increases, is studied for contact pairs of soft (Au/Au contact), harder (Ru/Ru contact), and mixed material configuration (Au/Ru contact). An enhanced stability of the bimetallic contact Au/Ru is demonstrated, considering sensitivity to power increase related to creep effects and topological modifications of the contact surfaces. These results are compared to previous ones and discussed in a theoretical way by considering the temperature distribution around the hottest area at the contact interface.

Figures in this Article
© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Adrien Broué ; Jérémie Dhennin ; Frédéric Courtade ; Christel Dieppedal ; Patrick Pons, et al.
"Characterization of gold/gold, gold/ruthenium, and ruthenium/ruthenium ohmic contacts in MEMS switches improved by a novel methodology", J. Micro/Nanolith. MEMS MOEMS. 9(4), 041102 (December 06, 2010). ; http://dx.doi.org/10.1117/1.3504663


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