Special Section on Reliability, Packaging, Testing, and Characterization of MEMS and MOEMS II

Design, manufacturing, and qualification of an uncooled microbolometer focal plane array–based radiometric package for space applications

[+] Author Affiliations
Sonia García-Blanco

INO, 2740 Einstein Street, Québec, Canada G1P 4S4

Patrice Côté

INO, 2740 Einstein Street, Québec, Canada G1P 4S4

Melanie Leclerc, Yan Desroches, Jean-Sol Caron

INO, 2740 Einstein Street, Québec, Canada G1P 4S4

Nathalie Blanchard

INO, 2740 Einstein Street, Québec, Canada G1P 4S4

Linh Ngo Phong

Canadian Space Agency, 6767 route de l'Aéroport, Saint-Hubert, QC J3Y 8Y9, Canada

Francois Châteauneuf, Timothy Pope

INO, 2740 Einstein Street, Québec, Canada G1P 4S4

J. Micro/Nanolith. MEMS MOEMS. 9(4), 041105 (December 29, 2010). doi:10.1117/1.3492413
History: Received March 31, 2010; Revised June 09, 2010; Accepted June 15, 2010; Published December 29, 2010; Online December 29, 2010
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Uncooled microbolometer detectors are well suited for space applications due to their low power consumption while still exhibiting adequate performance. Furthermore, the spectral range of their response could be tuned from the mid- to the far-infrared to meet different mission requirements. If radiometric measurements are required, the radiometric error induced by variation of the temperature of the detector environment must be minimized. In a radiometric package, the detector environment is thermally stabilized by means of a temperature-controlled radiation shield. The radiation shield must be designed to prevent stray radiation from reaching the detector. A radiometric packaging technology for uncooled microbolometer FPAs is presented. The selection of materials is discussed and the final choices presented based on thermal simulations and experimental data. The radiometric stability with respect to stray light and variation of the temperature of the environment as well as the different noise components studied by means of the Allan variance are presented. It is also shown that the device successfully passed the prescribed environmental tests without degradation of performance.

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© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Sonia García-Blanco ; Patrice Côté ; Melanie Leclerc ; Nathalie Blanchard ; Yan Desroches, et al.
"Design, manufacturing, and qualification of an uncooled microbolometer focal plane array–based radiometric package for space applications", J. Micro/Nanolith. MEMS MOEMS. 9(4), 041105 (December 29, 2010). ; http://dx.doi.org/10.1117/1.3492413


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