Special Section on Reliability, Packaging, Testing, and Characterization of MEMS and MOEMS II

Pressure sensing in vacuum hermetic micropackaging for MOEMS-MEMS

[+] Author Affiliations
Marco Michele Sisto

Institut National d’Optique, 2740, rue Einstein, Québec, Quebec G1P 4S4 Canada

Sonia García-Blanco, Loïc Le Noc, Bruno Tremblay, Yan Desroches, Jean-Sol Caron, Francis Provencal, Francis Picard

Institut National d’Optique, 2740, rue Einstein, Québec, Quebec G1P 4S4 Canada

J. Micro/Nanolith. MEMS MOEMS. 9(4), 041109 (November 19, 2010). doi:10.1117/1.3506744
History: Received March 03, 2010; Revised September 12, 2010; Accepted September 17, 2010; Published November 19, 2010; Online November 19, 2010
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Packaging constitutes one of the most costly steps of MEMS/MOEMS manufacturing. Uncooled IR bolometers require a vacuum atmosphere of <10 mTorr to operate at their highest sensitivity. The bolometer response is also dependent on the package temperature. In order to minimize cost, real estate, and power consumption, temperature stabilization is typically not provided to the package. Hence, long-term high-sensitivity operation of IR bolometric radiometers requires a calibration as function of in-package pressure and temperature. A low-cost and accurate means of measuring the pressure in the package without being affected by the operating temperature is therefore needed. The Institut National d’Optique (INO) has developed a low-cost, low-temperature hybrid vacuum micropackaging technology. An equivalent flow rate of 4 × 10−14 Torr L /s for storage at 80°C has been obtained without getter. Even with such low flow, the long-term stabilization of residual pressure variations affects the sensitivity and calibration of the IR bolometers. INO has developed microelectromechanical systems pressure sensors that allow for real-time measurement of package pressure of >1 mTorr and can be integrated with the IR bolometers in a die-level packaging process or microfabricated simultaneously on the same die. We present the typical performance and measurement uncertainty of these pressure sensors along with a reading method that provides a pressure measurement with a dependence on the package temperature as low as 0.7%/°C. A complex reading circuit or temperature control of the packages are not required, making the pressure sensor well adapted for low-cost high-volume production and integration with IR bolometer arrays.

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© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Marco Michele Sisto ; Sonia García-Blanco ; Loïc Le Noc ; Bruno Tremblay ; Yan Desroches, et al.
"Pressure sensing in vacuum hermetic micropackaging for MOEMS-MEMS", J. Micro/Nanolith. MEMS MOEMS. 9(4), 041109 (November 19, 2010). ; http://dx.doi.org/10.1117/1.3506744


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