Special Section on Theory and Practice of MEMS, NEMS, and MOEMS

Formation of polymer microneedle arrays using soft lithography

[+] Author Affiliations
Yoshimichi Ami

Keio University, Department of Mechanical Engineering, 3–14-1 Hiyoshi, Kohoku-ku, Yokohama-shi, Kanagawa-ken 223–8522, Japan

Hiroto Tachikawa

Keio University, Department of Mechanical Engineering, 3–14-1 Hiyoshi, Kohoku-ku, Yokohama-shi, Kanagawa-ken 223–8522, Japan

Naoki Takano

Keio University, Department of Mechanical Engineering, 3–14-1 Hiyoshi, Kohoku-ku, Yokohama-shi, Kanagawa-ken 223–8522, Japan

Norihisa Miki

Keio University, Department of Mechanical Engineering, 3–14-1 Hiyoshi, Kohoku-ku, Yokohama-shi, Kanagawa-ken 223–8522, Japan and PRESTO: Precursory Research for Embryonic Science and Technology, Japan Science and Technology Agency, 4–1-8 Honcho, Kawaguchi, Saitama 332–0012, Japan

J. Micro/Nanolith. MEMS MOEMS. 10(1), 011503 (March 15, 2011). doi:10.1117/1.3553393
History: Received August 01, 2010; Revised January 14, 2011; Accepted January 19, 2011; Published March 15, 2011; Online March 15, 2011
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We demonstrate the fabrication of polymer microneedle arrays using soft lithography. A photomask was designed to use Fresnel diffraction of UV light to create sharp, tapered hollows in SU-8, a negative photoresist, after development. Polymer microneedles were formed using these SU-8 structures as a mold. These polymer needles may be applicable as flexible electrodes in brain-machine interfaces because they are more likely to survive movement of the skin than conventional brittle silicon needles. Similar needles, made from medicinal substances, could be used for transdermal drug administration. For these applications, the needles must be long, sharp, and stiff enough to penetrate the stratum corneum (∼20 μm in thickness) and reach the viable epidermis (200–300 μm in thickness), but must not reach the dermis, which contains sensitive nerve endings. We successfully manufactured 20×20 microneedle arrays of polydimethylsiloxane with a needle length of 200 μm. We experimentally verified that these manufactured electrodes successfully penetrated the stratum corneum of a cultured skin.

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© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Yoshimichi Ami ; Hiroto Tachikawa ; Naoki Takano and Norihisa Miki
"Formation of polymer microneedle arrays using soft lithography", J. Micro/Nanolith. MEMS MOEMS. 10(1), 011503 (March 15, 2011). ; http://dx.doi.org/10.1117/1.3553393


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