Special Section on Theory and Practice of MEMS, NEMS, and MOEMS

Design and fabrication of an electrostatically actuated microdeformable focusing mirror

[+] Author Affiliations
Meng-Ju Lin

Feng Chia University, Department of Mechanical and Computer Aided Engineering, No. 100, Wenhua Road, Taichung, 407, Taiwan

Kou-Wei Wu

Feng Chia University, Department of Mechanical and Computer Aided Engineering, No. 100, Wenhua Road, Taichung, 407, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 10(1), 011504 (March 22, 2011). doi:10.1117/1.3564031
History: Received August 16, 2010; Revised February 04, 2011; Accepted February 18, 2011; Published March 22, 2011; Online March 22, 2011
Text Size: A A A

A microdeformable mirror was designed. One important design issue was whether or not the gap between substrates would be airtight. Another design issue was whether residual stress and annealing would affect the deformation. A theoretical description of the deformation of the mirror was obtained by means of the ideal gas law and the theory of plates and shells. It was found that an airtight gap would require application of greater voltages to deform the mirror, but would help the device avoid pull-in phenomena. The results showed that an annealed mirror would have a larger deformation and would be reliably useful even with a large voltage. To test the theory, an electrostatically actuated microdeformable focusing mirror was fabricated by bulk micromachining. To avoid high-temperature bonding, SU-8 photoresist was used as a wafer bonding layer. The results show that electrostatic force can be used to deform the mirror into a parabolic shape and that the parabolic mirror focuses light well. The theoretical predictions were confirmed by the experimental results.

Figures in this Article
© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Topics

Fabrication ; Mirrors

Citation

Meng-Ju Lin and Kou-Wei Wu
"Design and fabrication of an electrostatically actuated microdeformable focusing mirror", J. Micro/Nanolith. MEMS MOEMS. 10(1), 011504 (March 22, 2011). ; http://dx.doi.org/10.1117/1.3564031


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.