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Accurate measurement of very small line patterns in critical dimension scanning electron microscopy using model-based library matching technique

[+] Author Affiliations
Chie Shishido

Hitachi Ltd., Production Engineering Research Laboratory, 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa 244–0817, Japan

Maki Tanaka

Hitachi Ltd., Production Engineering Research Laboratory, 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa 244–0817, Japan

Mayuka Osaki

Hitachi Ltd., Production Engineering Research Laboratory, 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa 244–0817, Japan

J. Micro/Nanolith. MEMS MOEMS. 10(1), 013010 (February 28, 2011). doi:10.1117/1.3541780
History: Received July 26, 2010; Revised November 28, 2010; Accepted December 17, 2010; Published February 28, 2011; Online February 28, 2011
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Our purpose is to reduce the critical dimension (CD) bias for very small patterns with line widths of <15 nm. The model-based library (MBL) method, which estimates the dimensions and shape of a target pattern by comparing a measured scanning electron microscopy image waveform with a library of simulated waveforms, was modified in two ways. The first modification was the introduction of line-width variation into the library to overcome problems caused by significant changes in waveform due to changes in both sidewall shape and line width. The second modification was the fixation of MBL tool parameters to overcome problems caused by the reduction in pattern shape information due to merging of right and left white bands. We verified the effectiveness of the modified MBL method by applying it to actual silicon patterns with line widths in the range 10–30 nm. The CD bias measured by MBL method for three heights (20, 50, and 80%) was consistent with the atomic force microscopy results. The CD biases at all heights were <0.5 nm, and the slopes of the CD biases with respect to the CD were <3%.

© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Chie Shishido ; Maki Tanaka and Mayuka Osaki
"Accurate measurement of very small line patterns in critical dimension scanning electron microscopy using model-based library matching technique", J. Micro/Nanolith. MEMS MOEMS. 10(1), 013010 (February 28, 2011). ; http://dx.doi.org/10.1117/1.3541780


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