Articles

Light-shield border impact on the printability of extreme-ultraviolet mask

[+] Author Affiliations
Takashi Kamo

Semiconductor Leading Edge Technologies, Inc. (Selete) MIRAI, 16–1 Onogawa, Tsukuba-shi, Ibaraki 305-8569, Japan

Kazuo Tawarayama, Yuusuke Tanaka, Yukiyasu Arisawa, Hajime Aoyama, Toshihiko Tanaka, Osamu Suga

Semiconductor Leading Edge Technologies, Inc. (Selete) MIRAI, 16–1 Onogawa, Tsukuba-shi, Ibaraki 305-8569, Japan

J. Micro/Nanolith. MEMS MOEMS. 10(2), 023001 (April 13, 2011). doi:10.1117/1.3574117
History: Received December 01, 2010; Revised February 04, 2011; Accepted March 02, 2011; Published April 13, 2011; Online April 13, 2011
Text Size: A A A

When a thinner absorber mask is applied to extreme ultraviolet (EUV) lithography for chip production, it becomes essential to a introduce light-shield border in order to suppress the leakage of EUV light from the adjacent exposure shots. In this paper, we evaluate the leakage of both EUV and out-of-band from light-shield border and clarify the dependence of lithographic performance on light-shield border structure using a small field exposure tool with/without spectral purify filter (SPF). Then we evaluate the lithographic performance of a thin absorber EUV mask with light-shield border of the etched multilayer type and demonstrate the merit of its structure using a full-field scanner operating under the currently employed condition of EUV source in which SPF is not installed.

Figures in this Article
© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Takashi Kamo ; Kazuo Tawarayama ; Yuusuke Tanaka ; Yukiyasu Arisawa ; Hajime Aoyama, et al.
"Light-shield border impact on the printability of extreme-ultraviolet mask", J. Micro/Nanolith. MEMS MOEMS. 10(2), 023001 (April 13, 2011). ; http://dx.doi.org/10.1117/1.3574117


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement


 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.