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Monolithically integrated low-loss three-dimensional spot-size converter and silicon photonic waveguides constructed by nanotuned Bosch process and oxidation

[+] Author Affiliations
Ling-Han Li

The University of Tokyo, Research Center for Advanced Science and Technology, Rm. 303, Building 3, 4-6-1 Komaba Meguro-ku, Tokyo, Japan

Akio Higo

The University of Tokyo, Research Center for Advanced Science and Technology, Rm. 303, Building 3, 4-6-1 Komaba Meguro-ku, Tokyo, Japan

Masakazu Sugiyama

The University of Tokyo, Department of Electrical Engineering and Information Systems, Rm. 230, Engineering Building 10, 2-11-16 Yayoi, Bunkyo-ku, Tokyo, Japan

Yoshiaki Nakano

The University of Tokyo, Research Center for Advanced Science and Technology, Rm. 303, Building 3, 4-6-1 Komaba, Meguro-ku, Tokyo, Japan

J. Micro/Nanolith. MEMS MOEMS. 10(2), 023002 (April 13, 2011). doi:10.1117/1.3574143
History: Received August 25, 2010; Revised February 03, 2011; Accepted March 10, 2011; Published April 13, 2011; Online April 13, 2011
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This paper presents a three-dimensional (3D) tapered spot-size converter connecting to silicon wire waveguide and silicon rib waveguide. The silicon 3D structure was essentially formed by a single-step deep anisotropic dry etching of arrayed submicron-scale line patterns with different pitches, resulting in a tailored depth profile which is controlled by the line pattern through loading effect. Subsequent thermal oxidation and removal of the oxidized portion with wet etching led to a bare 3D silicon structure with smooth surface. The optical mode from a 4.6 μm × 3.1 μm silicon rib waveguide was successfully coupled to a 280 nm × 500 nm nanowire waveguide by a silicon 3D tapered spot-size converter, with average coupling loss of 1.52 dB.

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© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Ling-Han Li ; Akio Higo ; Masakazu Sugiyama and Yoshiaki Nakano
"Monolithically integrated low-loss three-dimensional spot-size converter and silicon photonic waveguides constructed by nanotuned Bosch process and oxidation", J. Micro/Nanolith. MEMS MOEMS. 10(2), 023002 (April 13, 2011). ; http://dx.doi.org/10.1117/1.3574143


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