Articles

Photoelectrical response properties of a linear high-temperature superconducting sensor coupled with a refractive microlens array

[+] Author Affiliations
Xinyu Zhang

Huazhong University of Science & Technology, Wuhan National Laboratory for Optoelectronics and, National Key Laboratory of Science and Technology on Multispectral Information Processing and, Institute for Pattern Recognition and Artificial Intelligence, Wuhan 430074, Hubei Province, China

Hui Li

Huazhong University of Science & Technology, Wuhan National Laboratory for Optoelectronics and, National Key Laboratory of Science and Technology on Multispectral Information Processing and, Institute for Pattern Recognition and Artificial Intelligence, Wuhan 430074, Hubei Province, China

Kan Liu

Huazhong University of Science & Technology, Wuhan National Laboratory for Optoelectronics and, National Key Laboratory of Science and Technology on Multispectral Information Processing and, Institute for Pattern Recognition and Artificial Intelligence, Wuhan 430074, Hubei Province, China

Jun Luo

Huazhong University of Science & Technology, Wuhan National Laboratory for Optoelectronics and, National Key Laboratory of Science and Technology on Multispectral Information Processing and, Institute for Pattern Recognition and Artificial Intelligence, Wuhan 430074, Hubei Province, China

Changsheng Xie

Huazhong University of Science & Technology, Wuhan National Laboratory for Optoelectronics, Wuhan 430074, Hubei Province, China

An Ji

The Chinese Academy of Sciences, Institute of Semiconductors, Beijing, 100083, China

Tianxu Zhang

Huazhong University of Science & Technology, National Key Laboratory of Science and Technology on Multispectral Information Processing and, Institute for Pattern Recognition and Artificial Intelligence, Wuhan 430074, Hubei Province, China

J. Micro/Nanolith. MEMS MOEMS. 10(2), 023011 (June 29, 2011). doi:10.1117/1.3590939
History: Received August 30, 2010; Revised March 26, 2011; Accepted March 29, 2011; Published June 29, 2011; Online June 29, 2011
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The photoelectrical response properties of a linear high-temperature (high-Tc) superconducting sensor coupled with a refractive microlens array are investigated. The theoretical analysis and measurements demonstrate that the photoelectrical response uniformity of superconducting sensors is not always improved simultaneously with the enhancement of the common photoelectrical performances of superconducting sensors, such as the responsivity, the noise equivalent power, and the detectivity, after coupling cylinder microlenses with them. A linear 8-pixel high-Tc YBa2Cu3O7-δ superconducting thin film sensor and a quartz microlens array of 32×64, are designed and then fabricated and finally coupled for detection infrared radiation in the wavelength range of 1 to 5 μm. The superconducting sensors are characterized through a common measurement method.

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© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Xinyu Zhang ; Hui Li ; Kan Liu ; Jun Luo ; Changsheng Xie, et al.
"Photoelectrical response properties of a linear high-temperature superconducting sensor coupled with a refractive microlens array", J. Micro/Nanolith. MEMS MOEMS. 10(2), 023011 (June 29, 2011). ; http://dx.doi.org/10.1117/1.3590939


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