Articles

Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes

[+] Author Affiliations
Andreas Tortschanoff

Carinthian Tech Research AG, Villach, 9500 Austria

Albert Frank

Carinthian Tech Research AG, Villach, 9500 Austria

Michael Wildenhain

Fraunhofer Institute for Photonic Microsystems, Dresden, 01109 Germany

Thilo Sandner

Fraunhofer Institute for Photonic Microsystems, Dresden, 01109 Germany

Andreas Kenda

Carinthian Tech Research AG, Villach, 9500 Austria

J. Micro/Nanolith. MEMS MOEMS. 10(3), 033006 (August 12, 2011). doi:10.1117/1.3609230
History: Received March 29, 2011; Revised May 19, 2011; Accepted June 15, 2011; Published August 12, 2011; Online August 12, 2011
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We have developed compact devices to control electrostatically driven resonant micromirrors with one and two axes. For stable oscillation with large amplitude, operation close to resonance must be ensured under varying environmental conditions. Our devices feature optical position sensing and driver electronics with closed loop control. In this contribution, we present in much detail the novel two-dimensional device and highlight specific aspects of this system.

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© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Andreas Tortschanoff ; Albert Frank ; Michael Wildenhain ; Thilo Sandner and Andreas Kenda
"Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes", J. Micro/Nanolith. MEMS MOEMS. 10(3), 033006 (August 12, 2011). ; http://dx.doi.org/10.1117/1.3609230


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