Articles

Mask replication using jet and flash imprint lithography

[+] Author Affiliations
Kosta S. Selinidis, Cynthia B. Brooks, Gary F. Doyle, Laura Brown, Chris Jones, Joseph Imhof, Dwayne L. LaBrake, Douglas J. Resnick, S. V. Sreenivasan

Molecular Imprints, Inc., 1807-C West Braker Lane, Austin, Texas 78758

J. Micro/Nanolith. MEMS MOEMS. 10(4), 043005 (October 21, 2011). doi:10.1117/1.3646523
History: Received June 16, 2011; Revised August 30, 2011; Accepted September 15, 2011; Published October 21, 2011; Online October 21, 2011
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The jet and flash imprint lithography (J-FILTM) process uses drop dispensing of UV curable resists to assist high resolution patterning for subsequent dry etch pattern transfer. The technology is actively being used to develop solutions for memory markets including flash memory and patterned media for hard disk drives. It is anticipated that the lifetime of a single template (for patterned media) or mask (for semiconductors) will be on the order of 104 to 105 imprints. This suggests that tens of thousands of templates/masks will be required to satisfy the needs of a manufacturing environment. Electron-beam patterning is too slow to feasibly deliver these volumes, but instead can provide a high quality master mask which can be replicated many times with an imprint lithography tool. This strategy has the capability to produce the required supply of “working” templates/masks. In this paper, we review the development of the mask form factor, imprint replication tools, and the semiconductor mask replication process. A PerfectaTM MR5000 mask replication tool has been developed specifically to pattern replica masks from an e-beam written master. Performance results, including image placement, critical dimension uniformity, and pattern transfer, are covered in detail.

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© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Kosta S. Selinidis ; Cynthia B. Brooks ; Gary F. Doyle ; Laura Brown ; Chris Jones, et al.
"Mask replication using jet and flash imprint lithography", J. Micro/Nanolith. MEMS MOEMS. 10(4), 043005 (October 21, 2011). ; http://dx.doi.org/10.1117/1.3646523


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