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Lossless circuit layout image compression algorithm for maskless direct write lithography systems

[+] Author Affiliations
Jeehong Yang

University of Michigan, Electrical Engineering and Computer Science Department, Ann Arbor, Michigan 48109

Serap A. Savari

Texas A&M University, Electrical and Computer Engineering Department, College Station, Texas 77843

J. Micro/Nanolith. MEMS MOEMS. 10(4), 043007 (November 08, 2011). doi:10.1117/1.3644620
History: Accepted September 09, 2011; Revised July 19, 2011; Received August 17, 2010; Published November 08, 2011; Online November 08, 2011
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The recent algorithm Corner is a transform-based technique to represent a circuit layout image for maskless direct write lithography systems. We improve the lossless circuit layout compression algorithm Corner so that 1. it requires fewer symbols during the corner transform, 2. it has a simpler and faster decoding process, while 3. it requires a similar amount of memory for the decoding process.

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© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Jeehong Yang and Serap A. Savari
"Lossless circuit layout image compression algorithm for maskless direct write lithography systems", J. Micro/Nanolith. MEMS MOEMS. 10(4), 043007 (November 08, 2011). ; http://dx.doi.org/10.1117/1.3644620


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