Articles

Highly sensitive and fast scanner focus monitoring method using forbidden pitch pattern

[+] Author Affiliations
Jinseok Heo

Samsung Electronics Co. Ltd., San #16 Banwol-Dong, Hwasung-City, Gyeonggi-Do, Korea 445-701

Jeong-Ho Yeo

Samsung Electronics Co. Ltd., San #16 Banwol-Dong, Hwasung-City, Gyeonggi-Do, Korea 445-701

Younghee Kim

Samsung Electronics Co. Ltd., San #16 Banwol-Dong, Hwasung-City, Gyeonggi-Do, Korea 445-701

J. Micro/Nanolith. MEMS MOEMS. 10(4), 043011 (November 29, 2011). doi:10.1117/1.3658022
History: Received April 10, 2011; Revised August 07, 2011; Accepted October 13, 2011; Published November 29, 2011; Online November 29, 2011
Text Size: A A A

Forbidden pitches that are introduced under certain illumination conditions can have extremely narrow depth of focus (DOF), so that when a lithographic pattern is transferred to a wafer, the forbidden pitch should be removed from the layout. However, the sensitivity of this narrow DOF can be utilized to monitor focus changes in the scanner system itself. In this paper, a newly developed focus monitoring method utilizing the forbidden pitches is introduced and the sensitivity and advantages of this method are discussed in detail.

Figures in this Article
© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Topics

Scanners

Citation

Jinseok Heo ; Jeong-Ho Yeo and Younghee Kim
"Highly sensitive and fast scanner focus monitoring method using forbidden pitch pattern", J. Micro/Nanolith. MEMS MOEMS. 10(4), 043011 (November 29, 2011). ; http://dx.doi.org/10.1117/1.3658022


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Journal Articles

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.