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Controllable fabrication of enclosed micro/nanochannels via polymethyl methacrylate pattern as sacrificial template and capillary effect

[+] Author Affiliations
Yunqiao Wu

Ningbo University, Faculty of Science, Institute of Photonics, Ningbo 315211, Zhejiang, China and Taiyuan University of Technology, Department of Physics and Optoelectronics, Institute of Optoelectronic Engineering, Taiyuan 030024, China and City University of Hong Kong, Department of Electronic Engineering, Tat Chee Avenue, Kowloon, Hong Kong

Jun Zhou

Ningbo University, Faculty of Science, Institute of Photonics, Ningbo 315211, Zhejiang, China

Edwin Y. B. Pun

City University of Hong Kong, Department of Electronic Engineering, Tat Chee Avenue, Kowloon, Hong Kong

J. Micro/Nanolith. MEMS MOEMS. 10(4), 049701 (December 14, 2011). doi:10.1117/1.3665215
History: Received June 30, 2011; Revised September 27, 2011; Accepted November 11, 2011; Published December 14, 2011; Online December 14, 2011
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High quality rectangular micro- to nanochannels with SiO2 shells have been fabricated by using optimized preparation parameters. Various dimensions of cross section of channels have been effectively controlled via the polymethyl methacrylate template as a suitable sacrificial layer in the processes of pattern formation and nanolithography. And, the fabricated channels have excellent shape uniformity, smooth inner surface, and vertical sidewalls along the longitudinal axis, which is confirmed by the good agreement between the experimental data and theoretical values of the mean filling speeds of liquids in the confined space. This technique exhibits the potential advantage for the controllable fabrication of various micro- to nanofluidic devices.

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© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Yunqiao Wu ; Jun Zhou and Edwin Y. B. Pun
"Controllable fabrication of enclosed micro/nanochannels via polymethyl methacrylate pattern as sacrificial template and capillary effect", J. Micro/Nanolith. MEMS MOEMS. 10(4), 049701 (December 14, 2011). ; http://dx.doi.org/10.1117/1.3665215


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