Special Section on Dimensional Metrology with Atomic Force Microscopy: Instruments and Applications

Atomic force microscope method for sidewall measurement through carbon nanotube probe deformation correction

[+] Author Affiliations
Masahiro Watanabe

Yokohama Research Lab, Hitachi Ltd., 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa-ken 244-0817, Japan

Shuichi Baba

Yokohama Research Lab, Hitachi Ltd., 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa-ken 244-0817, Japan

Toshihiko Nakata

Yokohama Research Lab, Hitachi Ltd., 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa-ken 244-0817, Japan

Takafumi Morimoto

Hitachi Construction Machinery Co., Ltd., 650 Kandatsu-machi, Tsuchiura-shi, Ibaraki-ken 300-0013, Japan

Satoshi Sekino

Hitachi Construction Machinery Co., Ltd., 650 Kandatsu-machi, Tsuchiura-shi, Ibaraki-ken 300-0013, Japan

Hiroshi Itoh

National Institute of Advanced Industrial Science and Technology, AIST Tsukuba Central 2, 1-1 Umezono 1-Chome, Tsukuba-shi, Ibaraki-ken 305-8568, Japan

J. Micro/Nanolith. MEMS MOEMS. 11(1), 011009 (Mar 12, 2012). doi:10.1117/1.JMM.11.1.011009
History: Received August 5, 2011; Revised October 15, 2011; Accepted October 19, 2011
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Abstract.  To use atomic force microscope to measure narrow vertical features is challenging. Using carbon nanotube (CNT) probes is a possible remedy. However, even with its extremely high stiffness, van der Waals attractive force from steep sidewalls bends CNT probes. This probe deflection effect causes deformation (or “swelling”) of the measured profile. When measuring 100-nm-high vertical sidewalls with a 27-nm-diameter and 265-nm-long CNT probe, the probe deflection at the bottom is estimated as large as 5.8 nm. This phenomenon is inevitable when using long and thin probes. We proposed a method to correct this probe deflection effect. Detecting torsional motion of the base cantilever of the CNT probe makes it possible to estimate the CNT probe deflection. Using this information, we have developed a technique for correcting the probe deformation effect from measured profiles. This technique, in combination with correction of the probe shape effect, enables vertical sidewall profile measurement with AFM.

© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Masahiro Watanabe ; Shuichi Baba ; Toshihiko Nakata ; Takafumi Morimoto ; Satoshi Sekino, et al.
"Atomic force microscope method for sidewall measurement through carbon nanotube probe deformation correction", J. Micro/Nanolith. MEMS MOEMS. 11(1), 011009 (Mar 12, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.1.011009


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