Regular Articles

Micromachined optically transparent, flexible pressure sensor array exhibiting ultrahigh sensitivity

[+] Author Affiliations
John Yan

University of California, Davis, Department of Electrical and Computer Engineering, One Shields Avenue, Davis, California 95616

J. Micro/Nanolith. MEMS MOEMS. 11(1), 013005 (Feb 23, 2012). doi:10.1117/1.JMM.11.1.013005
History: Received September 23, 2011; Revised November 6, 2011; Accepted November 21, 2011
Text Size: A A A

Abstract.  Development of an array of ultrasensitive capacitive pressure sensors which is both optically transparent in the visible range and flexible would represent a significant advance over current sensor capabilities. To construct these micromachined pressure sensors, the efficacy of oxygen plasma to bond the microfluidic network constructed out of polydimethlysiloxane and various plastic substrates has been examined. These pressure sensing elements can find potential applications in lab-on-a-chip environments, biosensors and photonic switching. The design, modeling, fabrication and measurement results are presented.

Figures in this Article
© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

John Yan
"Micromachined optically transparent, flexible pressure sensor array exhibiting ultrahigh sensitivity", J. Micro/Nanolith. MEMS MOEMS. 11(1), 013005 (Feb 23, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.1.013005


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.