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Microelectromechanical torsional varactors with low parasitic capacitances and high dynamic range

[+] Author Affiliations
Chenniappan Venkatesh

Indian Institute of Science, Department of Electrical Communication Engineering, Bangalore 560012, India

Navakanta Bhat

Indian Institute of Science, Department of Electrical Communication Engineering, Bangalore 560012, India

K. J. Vinoy

Indian Institute of Science, Department of Electrical Communication Engineering, Bangalore 560012, India

Satish Grandhi

Indian Institute of Science, Department of Electrical Communication Engineering, Bangalore 560012, India

J. Micro/Nanolith. MEMS MOEMS. 11(1), 013006 (Feb 27, 2012). doi:10.1117/1.JMM.11.1.013006
History: Received June 30, 2011; Revised October 26, 2011; Accepted November 29, 2011
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Abstract.  This work focuses on the design of torsional microelectromechanical systems (MEMS) varactors to achieve highdynamic range of capacitances. MEMS varactors fabricated through the polyMUMPS process are characterized at low and high frequencies for their capacitance-voltage characteristics and electrical parasitics. The effect of parasitic capacitances on tuning ratio is studied and an equivalent circuit is developed. Two variants of torsional varactors that help to improve the dynamic range of torsional varactors despite the parasitics are proposed and characterized. A tuning ratio of 1:8, which is the highest reported in literature, has been obtained. We also demonstrate through simulations that much higher tuning ratios can be obtained with the designs proposed. The designs and experimental results presented are relevant to CMOS fabrication processes that use low resistivity substrate.

© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Chenniappan Venkatesh ; Navakanta Bhat ; K. J. Vinoy and Satish Grandhi
"Microelectromechanical torsional varactors with low parasitic capacitances and high dynamic range", J. Micro/Nanolith. MEMS MOEMS. 11(1), 013006 (Feb 27, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.1.013006


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