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Fabrication of functional silicon-based nanoporous membranes

[+] Author Affiliations
Nazar Ileri

University of California Davis, Chemical Engineering and Materials Science Department, Davis, California 95616

Lawrence Livermore National Laboratory, Livermore, California 94550

Pieter Stroeve, Ahmet Palazoglu, Roland Faller

University of California Davis, Chemical Engineering and Materials Science Department, Davis, California 95616

Saleem H. Zaidi

Gratings, Inc., Albuquerque, New Mexico 87107

Hoang T. Nguyen, Jerald A. Britten, Sonia E. Létant, Joseph W. Tringe

Lawrence Livermore National Laboratory, Livermore, California 94550

J. Micro/Nanolith. MEMS MOEMS. 11(1), 013012 (Mar 22, 2012). doi:10.1117/1.JMM.11.1.013012
History: Received November 11, 2011; Revised February 2, 2012; Accepted February 16, 2012
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Abstract.  Macroscopic porous membranes with pore diameter uniformity approaching the nanometer scale have great potential to significantly increase the speed, selectivity, and efficiency of molecular separations. We present fabrication, characterization, and molecular transport evaluation of nanoporous thin silicon-based sieves created by laser interferometric lithography (LIL). This fabrication approach is ideally suited for the integration of nanostructured pore arrays into larger microfluidic processing systems, using a simple all-silicon lithographic process. Submilli-meter-scale planar arrays of uniform cylindrical and pyramidal nanopores are created in silicon nitride and silicon, respectively, with average pore diameters below 250 nm and significantly smaller standard error than commercial polycarbonate track etched (PCTE) membranes. Molecular transport properties of short cylindrical pores fabricated by LIL are compared to those of thicker commercial PCTE membranes for the first time. A 10-fold increase in pyridine pore flux is achieved with thin membranes relative to commercial sieves, without any modification of the membrane surface.

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© 2012 Society of Photo-Optical Instrumentation Engineers

Topics

Fabrication ; Silicon

Citation

Nazar Ileri ; Pieter Stroeve ; Ahmet Palazoglu ; Roland Faller ; Saleem H. Zaidi, et al.
"Fabrication of functional silicon-based nanoporous membranes", J. Micro/Nanolith. MEMS MOEMS. 11(1), 013012 (Mar 22, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.1.013012


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