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Rotary microelectromechanical system comb-drive actuator with smooth sidewall for photonic applications

[+] Author Affiliations
Mohammad Quamrul Huda

University of Alberta, Department of Chemistry, Edmonton, Alberta T6G 2G2, Canada

University of Alberta, Department of Electrical & Computer Engineering, Edmonton, Alberta T6G 2V4, Canada

Talukder Mohammad Fahim Amin

University of Alberta, Department of Chemistry, Edmonton, Alberta T6G 2G2, Canada

University of Alberta, Department of Electrical & Computer Engineering, Edmonton, Alberta T6G 2V4, Canada

Yuebin Ning

Norcada Inc., Edmonton, Alberta T6E 5B6, Canada

Graham McKinnon

Norcada Inc., Edmonton, Alberta T6E 5B6, Canada

John Tulip

Boreal Laser, Inc., Spruce Grove, Alberta T7Y 1A8, Canada

Wolfgang Jäger

University of Alberta, Department of Chemistry, Edmonton, Alberta T6G 2G2, Canada

J. Micro/Nanolith. MEMS MOEMS. 11(2), 023012 (Jun 20, 2012). doi:10.1117/1.JMM.11.2.023012
History: Received January 13, 2012; Revised April 4, 2012; Accepted May 16, 2012
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Abstract.  Rotary comb-drive electrostatic actuators with smooth vertical sidewalls were designed and fabricated for photonic applications. Silicon on insulator wafers with device layer thicknesses of up to 100 μm and oxide layers of 1 to 2 μm were used. Structures were fabricated through bulk micromachining of the handle layer, followed by removal of the buried oxide. Deep reactive ion etching (DRIE) of the device layer defined the comb structure with simultaneous release of the movable arm. Thick photoresist and oxide masking layers were used for the high aspect ratio deep etches. Notching effects or depth variations of device layers were not observed. Etch/passivation cycles in DRIE were optimized to obtain smooth sidewalls of less than 5 nm roughness. Traces of etch scallops were confined only to the first few microns of the top and bottom edges of the reflecting sidewall. A movable arm length of 2 mm with a maximum rotation of 2.8 deg was achieved. The edge deflection was over 100 μm at 100 V. The fabricated structure provides a long reflecting sidewall, that is accessible for hybrid integration, in three dimensional space. The fabricated structures can be reliably operated in the kilohertz range.

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© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Mohammad Quamrul Huda ; Talukder Mohammad Fahim Amin ; Yuebin Ning ; Graham McKinnon ; John Tulip, et al.
"Rotary microelectromechanical system comb-drive actuator with smooth sidewall for photonic applications", J. Micro/Nanolith. MEMS MOEMS. 11(2), 023012 (Jun 20, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.2.023012


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