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Fabrication of nanoresonator biosensing arrays using nanoimprint lithography

[+] Author Affiliations
Alex Janzen

University of Alberta, & National Institute for Nanotechnology, Department of Electrical and Computer Engineering, Edmonton, Alberta, T6G 2V4, Canada

Sommayyeh Poshtiban

University of Alberta, & National Institute for Nanotechnology, Department of Electrical and Computer Engineering, Edmonton, Alberta, T6G 2V4, Canada

Amit Singh

University of Alberta, & National Institute for Nanotechnology, Department of Electrical and Computer Engineering, Edmonton, Alberta, T6G 2V4, Canada

Stephane Evoy

University of Alberta, & National Institute for Nanotechnology, Department of Electrical and Computer Engineering, Edmonton, Alberta, T6G 2V4, Canada

J. Micro/Nanolith. MEMS MOEMS. 11(2), 023013 (Jun 20, 2012). doi:10.1117/1.JMM.11.2.023013
History: Received January 6, 2012; Revised March 26, 2012; Accepted April 30, 2012
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Abstract.  Nanoimprint lithography was used to fabricate arrays of SiCN nanoscale resonators for biological analysis applications. A bilayer resist consisting of PMMA 495/LOR 3A allowed high fabrication yields for resonators of widths ranging from 120 to 300 nm, thicknesses of 40 and 70 nm, and a length of 14 μm. To our knowledge, these 120 nm resonators are the narrowest suspended structures ever fabricated via nanoimprinting. Device to device uniformity of resonant frequency was dictated by the uniformity of the tensile stress over the device layer. The 40 nm thick and 70 nm thick devices showed average resonant frequencies of 16.6±2MHz, and 21.7±0.3MHz, respectively. These devices were successfully employed as elements of arrays for the detection of a biological analyte. The biotin—streptavidin system was used for such purpose. The specific capture of streptavidin induced downward frequency shifts ranging from 100 to 300 kHz, corresponding to capture densities of roughly 1 to 5 molecules per 100nm2. Negative control experiments showed no net downward frequency shifts, demonstrating the specificity of the detection.

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© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Alex Janzen ; Sommayyeh Poshtiban ; Amit Singh and Stephane Evoy
"Fabrication of nanoresonator biosensing arrays using nanoimprint lithography", J. Micro/Nanolith. MEMS MOEMS. 11(2), 023013 (Jun 20, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.2.023013


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