Special Section on EUV Sources for Lithography

RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

[+] Author Affiliations
Konstantin N. Koshelev, Vladimir V. Ivanov, Vladimir M. Krivtsun

Institute of Spectroscopy RAS, Troitsk, Moscow Region, Fyzicheskaya 5, 142190 Russia

Vladimir G. Novikov, Alexander S. Grushin

Keldysh Institute of Applied Mathematics, Moscow, Miusskaya sq. 4, 125047 Russia

Viacheslav Medvedev

Institute of Spectroscopy RAS, Troitsk, Moscow Region, Fyzicheskaya 5, 142190 Russia

Dutch Institute for Fundamental Energy Research, P. O. Box 1207, 3430 BE Nieuwegein, The Netherlands

J. Micro/Nanolith. MEMS MOEMS. 11(2), 021112 (May 21, 2012). doi:10.1117/1.JMM.11.2.021112
History: Received September 20, 2011; Revised November 21, 2011; Accepted December 28, 2011
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Abstract.  An integrated model is developed to describe the hydrodynamics, atomic, and radiation processes that take place in extreme ultraviolet (EUV) radiation sources based on a laser-produced plasma with a distributed tin target. The modeling was performed using the RZLINE code—a numerical code for the simulation of EUV emission by hot dense plasmas. The purpose of the simulation is to evaluate the spectral characteristics of the radiation source, conversion efficiency, source size, evaporation rate of the target, energetic, and space distribution of debris (nanoparticles, neutrals, and ions). The advantages of a distributed target in comparison with a single droplet target are also discussed.

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© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Konstantin N. Koshelev ; Vladimir V. Ivanov ; Vladimir G. Novikov ; Viacheslav Medvedev ; Alexander S. Grushin, et al.
"RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation", J. Micro/Nanolith. MEMS MOEMS. 11(2), 021112 (May 21, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.2.021112


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