RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

Konstantin Koshelev; Vladimir Ivanov; Viacheslav Medvedev; Vladimir M. Krivtsun; Vladimir G. Novikov; Alexander S. Grushin

doi:10.1117/1.JMM.11.2.021112

21 May 2012 Return-to-zero line code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

Konstantin Koshelev, Vladimir Ivanov, Viacheslav Medvedev, Vladimir M. Krivtsun, Vladimir G. Novikov, Alexander S. Grushin

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 2, 021112 (May 2012). https://doi.org/10.1117/1.JMM.11.2.021112

Abstract

An integrated model is developed to describe the hydrodynamics, atomic, and radiation processes that take place in extreme ultraviolet (EUV) radiation sources based on a laser-produced plasma with a distributed tin target. The modeling was performed using the return-to-zero line code-a numerical code for the simulation of EUV emission by hot dense plasmas. The purpose of the simulation is to evaluate the spectral characteristics of the radiation source, conversion efficiency, source size, evaporation rate of the target, energetic, and space distribution of debris (nanoparticles, neutrals, and ions). The advantages of a distributed target in comparison with a single droplet target are also discussed.

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Konstantin Koshelev, Vladimir Ivanov, Viacheslav Medvedev, Vladimir M. Krivtsun, Vladimir G. Novikov, and Alexander S. Grushin "Return-to-zero line code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(2), 021112 (21 May 2012). https://doi.org/10.1117/1.JMM.11.2.021112

Published: 21 May 2012

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