Special Section on EUV Sources for Lithography

Atomic-hydrogen cleaning of Sn from Mo/Si and DLC/Si extreme ultraviolet multilayer mirrors

[+] Author Affiliations
Wouter A. Soer, Maarten M. J. W. van Herpen, Martin J. J. Jak

Philips Group Innovation, High Tech Campus 34, 5656 AE Eindhoven, The Netherlands

Peter Gawlitza, Stefan Braun

Fraunhofer IWS, Winterbergstraße 28, 01277 Dresden, Germany

Nikolay N. Salashchenko, Nikolay I. Chkhalo

Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod 603950, Russia

Vadim Y. Banine

ASML, De Run 6501, 5504 DR Veldhoven, The Netherlands

J. Micro/Nanolith. MEMS MOEMS. 11(2), 021118 (May 03, 2012). doi:10.1117/1.JMM.11.2.021118
History: Received September 1, 2011; Revised November 11, 2011; Accepted January 12, 2012
Text Size: A A A

Abstract.  We have investigated the use of atomic-hydrogen-based cleaning to remove Sn contamination from extreme ultraviolet (EUV) multilayer mirrors. Mo and Si surfaces were cleaned at a relatively slow rate due to catalyzed dissociation of tin hydride on these surfaces. Mo/Si mirrors with B4C and Si3N4 cap layers and DLC-terminated DLC/Si mirrors showed complete removal of 10 nm Sn in 20 sec with full restoration of EUV reflectance. In addition, a prolonged cleaning treatment of 300 sec of a DLC/Si mirror resulted in only a minor EUV peak reflection loss of 1.2% absolute and no significant changes in infrared reflectance.

Figures in this Article
© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Wouter A. Soer ; Maarten M. J. W. van Herpen ; Martin J. J. Jak ; Peter Gawlitza ; Stefan Braun, et al.
"Atomic-hydrogen cleaning of Sn from Mo/Si and DLC/Si extreme ultraviolet multilayer mirrors", J. Micro/Nanolith. MEMS MOEMS. 11(2), 021118 (May 03, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.2.021118


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.