Atomic-hydrogen cleaning of Sn from Mo/Si and DLC/Si extreme ultraviolet multilayer mirrors

Wouter A. Soer; Maarten M.J.W. van Herpen; Martin J. Jak; Peter Gawlitza; Stefan Braun; Nikolay N. Salashchenko; Vadim Y. Banine

doi:10.1117/1.JMM.11.2.021118

3 May 2012 Atomic-hydrogen cleaning of Sn from Mo/Si and DLC/Si extreme ultraviolet multilayer mirrors

Wouter A. Soer, Maarten M.J.W. van Herpen, Martin J. Jak, Peter Gawlitza, Stefan Braun, Nikolay N. Salashchenko, Vadim Y. Banine

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 2, 021118 (May 2012). https://doi.org/10.1117/1.JMM.11.2.021118

Abstract

We have investigated the use of atomic-hydrogen-based cleaning to remove Sn contamination from extreme ultraviolet (EUV) multilayer mirrors. Mo and Si surfaces were cleaned at a relatively slow rate due to catalyzed dissociation of tin hydride on these surfaces. Mo/Si mirrors with B4C and Si₃N₄ cap layers and DLC-terminated DLC/Si mirrors showed complete removal of 10 nm Sn in 20 sec with full restoration of EUV reflectance. In addition, a prolonged cleaning treatment of 300 sec of a DLC/Si mirror resulted in only a minor EUV peak reflection loss of 1.2% absolute and no significant changes in infrared reflectance.

Citation Download Citation

Wouter A. Soer, Maarten M.J.W. van Herpen, Martin J. Jak, Peter Gawlitza, Stefan Braun, Nikolay N. Salashchenko, and Vadim Y. Banine "Atomic-hydrogen cleaning of Sn from Mo/Si and DLC/Si extreme ultraviolet multilayer mirrors," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(2), 021118 (3 May 2012). https://doi.org/10.1117/1.JMM.11.2.021118

Published: 3 May 2012

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available