Special Section on EUV Sources for Lithography

Extreme ultraviolet lasers: principles and potential for next-generation lithography

[+] Author Affiliations
Juerg E. Balmer, Davide Bleiner, Felix Staub

University of Bern, Institute of Applied Physics, CH-3012 Bern, Switzerland

J. Micro/Nanolith. MEMS MOEMS. 11(2), 021119 (May 10, 2012). doi:10.1117/1.JMM.11.2.021119
History: Received August 10, 2011; Revised November 22, 2011; Accepted December 28, 2011
Text Size: A A A

Abstract.  Extreme ultraviolet (EUV) lasers in the wavelength range of 10 to 20 nm have matured to a point where dedicated applications such as at-wavelength inspection of extreme-ultraviolet lithography (EUVL) masks become possible on the laboratory scale. The authors briefly review the principles of plasma-based EUV lasers, the progress made so far, and the output characteristics of interest to the EUVL community.

Figures in this Article
© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Juerg E. Balmer ; Davide Bleiner and Felix Staub
"Extreme ultraviolet lasers: principles and potential for next-generation lithography", J. Micro/Nanolith. MEMS MOEMS. 11(2), 021119 (May 10, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.2.021119


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.