Special Section on EUV Sources for Lithography

Potential of the FLASH free electron laser technology for the construction of a kW-scale light source for next-generation lithography

[+] Author Affiliations
Evgeny A. Schneidmiller, Vladimir F. Vogel, Hans Weise, Mikhail V. Yurkov

Deutsches Elektronen-Synchrotron (DESY), Notkestrasse 85, D-22607 Hamburg, Germany

J. Micro/Nanolith. MEMS MOEMS. 11(2), 021122 (May 29, 2012). doi:10.1117/1.JMM.11.2.021122
History: Received August 2, 2011; Revised November 3, 2011; Accepted January 10, 2012
Text Size: A A A

Abstract.  The driving engine of the free electron laser in Hamburg (FLASH) is an L-band superconducting accelerator. It is designed to operate in burst mode with an 800-ms pulse duration at a repetition rate of 10 Hz. The maximum accelerated beam current during the macropulse is 9 mA. Our analysis shows that the FLASH technology has great potential since it is possible to construct a FLASH-like free electron laser operating at the wavelength of 13.5 and 6.8 nm with an average power of up to 2.6 kW. Such a source meets the physical requirements for the light source for next-generation lithography.

Figures in this Article
© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Evgeny A. Schneidmiller ; Vladimir F. Vogel ; Hans Weise and Mikhail V. Yurkov
"Potential of the FLASH free electron laser technology for the construction of a kW-scale light source for next-generation lithography", J. Micro/Nanolith. MEMS MOEMS. 11(2), 021122 (May 29, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.2.021122


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement


 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.