Special Section on EUV Sources for Lithography

Design of high brightness laser-Compton source for extreme ultraviolet and soft x-ray wavelengths

[+] Author Affiliations
Kazuyuki Sakaue

Waseda University, Research Institute for Science and Engineering, Okubo 3-4-1, Shinjuku, Tokyo 169-8555, Japan

Akira Endo

Waseda University, Research Institute for Science and Engineering, Okubo 3-4-1, Shinjuku, Tokyo 169-8555, Japan

Masakazu Washio

Waseda University, Research Institute for Science and Engineering, Okubo 3-4-1, Shinjuku, Tokyo 169-8555, Japan

J. Micro/Nanolith. MEMS MOEMS. 11(2), 021124 (May 03, 2012). doi:10.1117/1.JMM.11.2.021124
History: Received July 29, 2011; Revised January 12, 2012; Accepted January 24, 2012
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Abstract.  Design of a clean, high-brightness light source is presented for extreme ultraviolet/soft x-ray (EUV/SXR) lithography research and mask inspection. Basic characteristics of classical laser-Compton scattering are reviewed, and the laser and electron beam parameters at relatively low energy (EUV to SXR) photon generation are optimized. Recent achievements in each component technology are evaluated on a continuous wave (CW)-operated electron linac and energy recovery linac system, based on superconducting technologies at a 1.3 GHz operation frequency, 10 kW average power, short pulse CO2 laser, and optical super cavity with a 600- enhancement- factor at 10.6 μm wavelength. Combining both the CW electron beam and short pulse CO2 laser with super-cavity enhancement, 1mW/2%b.w. flux and 30kW/mm2/sr/2%b.w. brightness laser-Compton source is designed at 6.7-nm wavelength. The technological gap in the present component technologies are discussed, as well as any further required developments.

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© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Kazuyuki Sakaue ; Akira Endo and Masakazu Washio
"Design of high brightness laser-Compton source for extreme ultraviolet and soft x-ray wavelengths", J. Micro/Nanolith. MEMS MOEMS. 11(2), 021124 (May 03, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.2.021124


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