Special Section on Reliability, Packaging, Testing, and Characterization of MEMS and MOEMS III

Effect of added mass using resonant peak shifting technique

[+] Author Affiliations
Rajesh Kumar Burra

GITAM University, Department of Electronics & Instrumentation Engineering, Visakhapatnam, 530045, India

Jyothi Vankara

GITAM University, Department of Electronics & Instrumentation Engineering, Visakhapatnam, 530045, India

D. V. Rama Kota Reddy

Andhra University College of Engineering (A), Department of Instrument Technology, Visakhapatnam, 530045, India

J. Micro/Nanolith. MEMS MOEMS. 11(2), 021203 (May 10, 2012). doi:10.1117/1.JMM.11.2.021203
History: Received October 18, 2011; Revised November 28, 2011; Accepted December 19, 2011
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Abstract.  Microcantilever is the fundamental structure for the realization of a microelectromechanical systems sensor with higher sensitivity and selectivity in a number of fields like biomedical, defense, and environmental. Present research is also focusing on the applications of microcantilever in the field of food industry. Among the two fundamental techniques for microcantilever, deflection and resonant peak shift, it was proven that the latter one is the best suited for added mass detection. In our study, we derive an analytical expression for δm based on the shift in frequency (δf') that accounts for the elasticity of the added mass and the location of the mass on the beam. In particular, we create a finite element methods model of our system in a commercial package, COMSOL (Bangalore, India), and carry out modal analysis for the cantilever beam resonator with and without the added mass, varying the relative stiffness and mass of the two components (the cantilever beam and the added mass), to compare the results of shift in resonant frequency with those obtained from rigid mass models. The results show the effect of elasticity clearly in certain ranges of relative stiffness and mass.

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© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Rajesh Kumar Burra ; Jyothi Vankara and D. V. Rama Kota Reddy
"Effect of added mass using resonant peak shifting technique", J. Micro/Nanolith. MEMS MOEMS. 11(2), 021203 (May 10, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.2.021203


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