Special Section on Reliability, Packaging, Testing, and Characterization of MEMS and MOEMS III

Parameter extraction of MEMS comb-drive near-resonance equivalent circuit: physically-based technique for a unique solution

[+] Author Affiliations
Yasser Sabry

Si-Ware Systems, 3 Khalid Ibn Al-Waleed Street, Heliopolis, Cairo 11361, Egypt

Université Paris-Est, Laboratoire ESYCOM, ESIEE, Noisy-le-Grand Cedex, Paris F-93162, France

Mostafa Medhat

Si-Ware Systems, 3 Khalid Ibn Al-Waleed Street, Heliopolis, Cairo 11361, Egypt

Bassam Saadany

Si-Ware Systems, 3 Khalid Ibn Al-Waleed Street, Heliopolis, Cairo 11361, Egypt

Tarik Bourouina

Université Paris-Est, Laboratoire ESYCOM, ESIEE, Noisy-le-Grand Cedex, Paris F-93162, France

Diaa Khalil

Si-Ware Systems, 3 Khalid Ibn Al-Waleed Street, Heliopolis, Cairo 11361, Egypt

Ain-Shams University, Faculty of Engineering, 11 Elsarayat Street, Abbassia, Cairo, Egypt

J. Micro/Nanolith. MEMS MOEMS. 11(2), 021205 (May 07, 2012). doi:10.1117/1.JMM.11.2.021205
History: Received August 31, 2011; Revised December 16, 2011; Accepted December 29, 2011
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Abstract.  A new extraction approach for MEMS comb-drive equivalent circuit parameters is presented. The proposed method eliminates the need for fitting and optimization by direct extraction from the measured data and, thus, avoids the nonuniqueness problem associated with fitting algorithms. A silicon-on-insulator-based MEMS comb-drive actuator is designed, fabricated, and measured, and its equivalent circuit is obtained by the proposed procedure. Analytical estimation for the uncertainty in the extracted values due to the discrete nature of the measurement frequency resolution is carried out. Uncertainty in the extracted values of the equivalent motional parameters is well below 0.6% when a 0.1-Hz frequency resolution is used. The method has been used to extract the resonator quality factor at both atmospheric and vacuum operations and can be extended to other types of resonators.

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© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Yasser Sabry ; Mostafa Medhat ; Bassam Saadany ; Tarik Bourouina and Diaa Khalil
"Parameter extraction of MEMS comb-drive near-resonance equivalent circuit: physically-based technique for a unique solution", J. Micro/Nanolith. MEMS MOEMS. 11(2), 021205 (May 07, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.2.021205


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