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Special Section on Reliability, Packaging, Testing, and Characterization of MEMS and MOEMS III

Frequency effects and life prediction of polysilicon microcantilever beams in bending fatigue

[+] Author Affiliations
Jeng-Nan Hung

National Tsing Hua University, Department of Power Mechanical Engineering, Hsinchu 30013, Taiwan

Hong Hocheng

National Tsing Hua University, Department of Power Mechanical Engineering, Hsinchu 30013, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 11(2), 021206 (May 11, 2012). doi:10.1117/1.JMM.11.2.021206
History: Received October 31, 2011; Revised January 4, 2012; Accepted January 16, 2012
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Abstract.  Microcantilever beams have been widely used in micro-electromechanical systems (MEMS) devices. Their reliability is an essential factor for a successful MEMS product in an industrial setting. This study discusses the fatigue life of polysilicon microcantilever beams of various dimensions that were subjected to bending by a piezoelectric actuator. Both experimental and analytical results were obtained. A 100-Hz piezoelectric actuator was used to facilitate the test runs with good repeatability of the fatigue load. A finite element-modeling program, ANSYS, was used to investigate the stress distribution on the microcantilever beam. The fatigue life of the specimen was found to lie between 1.23×107 and 1.29×108 cycles for stress level ranges from 4.07 to 2.31 GPa. The experimental data from this study were incorporated with published references into an S-N curve, which showed that the fatigue life was dependent on both stress and frequency levels of the loading cycles. Low frequency loading was associated with increased sensitivity of fatigue life versus stress level. An empirical correlation was established for predicting fatigue to provide the MEMS designer with a reference for various applications.

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© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Jeng-Nan Hung and Hong Hocheng
"Frequency effects and life prediction of polysilicon microcantilever beams in bending fatigue", J. Micro/Nanolith. MEMS MOEMS. 11(2), 021206 (May 11, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.2.021206


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