Regular Articles

MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers

[+] Author Affiliations
Anna Rissanen

VTT Technical Research Centre of Finland, TT3 PL1000, FIN-02044 VTT, Espoo, Finland,

Altti Akujärvi

VTT Technical Research Centre of Finland, TT3 PL1000, FIN-02044 VTT, Espoo, Finland,

Jarkko Antila

VTT Technical Research Centre of Finland, TT3 PL1000, FIN-02044 VTT, Espoo, Finland,

Martti Blomberg

VTT Technical Research Centre of Finland, TT3 PL1000, FIN-02044 VTT, Espoo, Finland,

Heikki Saari

VTT Technical Research Centre of Finland, TT3 PL1000, FIN-02044 VTT, Espoo, Finland,

J. Micro/Nanolith. MEMS MOEMS. 11(2), 023003 (May 25, 2012). doi:10.1117/1.JMM.11.2.023003
History: Received December 9, 2011; Revised February 24, 2012; Accepted March 28, 2012
Text Size: A A A

Abstract.  New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ=420nm and λ=670nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.

Figures in this Article
© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Anna Rissanen ; Altti Akujärvi ; Jarkko Antila ; Martti Blomberg and Heikki Saari
"MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers", J. Micro/Nanolith. MEMS MOEMS. 11(2), 023003 (May 25, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.2.023003


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Journal Articles

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.